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Journal Articles

Control of Vibratory MEMS Gyroscope With the Drive Mode Excited Through Parametric Resonance

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T. Perl, R. Maimon, S. Krylov, N. Shimkin
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research Papers
J. Vib. Acoust. October 2021, 143(5): 051013.
Paper No: VIB-20-1462
https://doi.org/10.1115/1.4050351
Published Online: March 24, 2021
View Articletitled, Control of Vibratory MEMS Gyroscope With the Drive Mode Excited Through Parametric Resonance
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Topics: Automatic gain control, Design, Microelectromechanical systems, Resonance, Control equipment, Open loop systems
Journal Articles

Experimental Characterization of the Electrostatic Levitation Force in MEMS Transducers

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Meysam Daeichin, Ronald N. Miles, Shahrzad Towfighian
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research Papers
J. Vib. Acoust. August 2020, 142(4): 041008.
Paper No: VIB-19-1314
https://doi.org/10.1115/1.4046625
Published Online: April 9, 2020
View Articletitled, Experimental Characterization of the Electrostatic Levitation Force in MEMS Transducers
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Topics: Electrodes, Levitation, Microelectromechanical systems, Transducers, Displacement, Resonance, Excitation, Stress, Damping, Manufacturing
Journal Articles

Nonlinear Dynamics of MEMS Arches Assuming Out-of-Plane Actuation Arrangement

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Hassen M. Ouakad, Fehmi Najar
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. August 2019, 141(4): 041010.
Paper No: VIB-18-1426
https://doi.org/10.1115/1.4043064
Published Online: April 30, 2019
View Articletitled, Nonlinear Dynamics of MEMS Arches Assuming Out-of-Plane Actuation Arrangement
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Topics: Arches, Microelectromechanical systems, Nonlinear dynamics, Electrodes, Microbeams
Journal Articles

Vibrational Response of Initially Deformed Bistable Microbeams Under the Combined Effect of Mechanical Shock Loads and Electrostatic Forces

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Jihad E. Alqasimi, Hassen M. Ouakad
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. April 2018, 140(2): 021013.
Paper No: VIB-17-1181
https://doi.org/10.1115/1.4038107
Published Online: October 27, 2017
View Articletitled, Vibrational Response of Initially Deformed Bistable Microbeams Under the Combined Effect of Mechanical Shock Loads and Electrostatic Forces
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Topics: Arches, Microelectromechanical systems, Shock (Mechanics), Stress, Shock waves, Microbeams, Deflection
Journal Articles

Stability of Ring-Type MEMS Gyroscopes Subjected to Stochastic Angular Speed Fluctuation

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Samuel F. Asokanthan, Soroush Arghavan, Mohamed Bognash
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. August 2017, 139(4): 040904.
Paper No: VIB-16-1571
https://doi.org/10.1115/1.4036452
Published Online: May 30, 2017
View Articletitled, Stability of Ring-Type MEMS Gyroscopes Subjected to Stochastic Angular Speed Fluctuation
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Topics: Damping, Microelectromechanical systems, Stability, Noise (Sound), Differential equations, White noise
Journal Articles

On Regularization in Design for Reliability for Nonlinear Planar Beam-Type Resonators

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Astitva Tripathi, Anil K. Bajaj
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. August 2017, 139(4): 040907.
Paper No: VIB-16-1576
https://doi.org/10.1115/1.4036624
Published Online: May 30, 2017
View Articletitled, On Regularization in Design for Reliability for Nonlinear Planar Beam-Type Resonators
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Topics: Design, Dimensions, Frequency response, Manufacturing, Optimization, Reliability, Resonance, Robustness, Uncertainty, Uncertainty quantification
Journal Articles

Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support

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Mark Pallay, Shahrzad Towfighian
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. April 2017, 139(2): 021002.
Paper No: VIB-16-1229
https://doi.org/10.1115/1.4034954
Published Online: December 7, 2016
View Articletitled, Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support
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Topics: Cantilever beams, Design, Microelectromechanical systems, Resonance, Sensors, Stiffness, Frequency response, Springs, Dimensions, Vibration
Journal Articles

Mass Sensitivity of Nonuniform Microcantilever Beams

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Sajal Sagar Singh, Prem Pal, Ashok Kumar Pandey
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Technical Briefs
J. Vib. Acoust. December 2016, 138(6): 064502.
Paper No: VIB-16-1056
https://doi.org/10.1115/1.4034079
Published Online: August 8, 2016
View Articletitled, Mass Sensitivity of Nonuniform Microcantilever Beams
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Topics: Boundary-value problems, Cantilever beams, Microelectromechanical systems, Mode shapes, Resonance, Sensors, Actuators, Galerkin method, Geometry
Journal Articles

Frequency Analysis of Linearly Coupled Modes of MEMS Arrays

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Prashant N. Kambali, Gyanadutta Swain, Ashok Kumar Pandey
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. April 2016, 138(2): 021017.
Paper No: VIB-15-1384
https://doi.org/10.1115/1.4032517
Published Online: February 5, 2016
View Articletitled, Frequency Analysis of Linearly Coupled Modes of MEMS Arrays
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Topics: Actuators, Deflection, Electrodes, Equations of motion, Microelectromechanical systems, Sensors, Tension, Microbeams
Journal Articles

Preshaping Command Functions to Control the Dynamic Impacts in MEMS

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Aurelio Somà, Giorgio De Pasquale
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. February 2016, 138(1): 011013.
Paper No: VIB-14-1136
https://doi.org/10.1115/1.4031754
Published Online: November 4, 2015
View Articletitled, Preshaping Command Functions to Control the Dynamic Impacts in MEMS
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Topics: Damping, Electrodes, Microelectromechanical systems, Vibration, Displacement, Robustness, Reliability, Dimensions
Journal Articles

Fringing Electrostatic Field Actuation of Microplates for Open Air Environment Sensing

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Avinoam Rabinovich, Assaf Ya'akobovitz, Slava Krylov
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. August 2014, 136(4): 041013.
Paper No: VIB-13-1346
https://doi.org/10.1115/1.4027559
Published Online: May 28, 2014
View Articletitled, Fringing Electrostatic Field Actuation of Microplates for Open Air Environment Sensing
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Topics: Boundary-value problems, Damping, Manufacturing, Microplates, Plates (structures), Pressure, Resonance, Vibration, Silicon, Simulation
Journal Articles

Modeling the Effects of the PCB Motion on the Response of Microstructures Under Mechanical Shock

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Abdallah H. Ramini, Mohammad I. Younis, Ronald Miles
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research Papers
J. Vib. Acoust. December 2011, 133(6): 061019.
https://doi.org/10.1115/1.4005219
Published Online: November 28, 2011
View Articletitled, Modeling the Effects of the PCB Motion on the Response of Microstructures Under Mechanical Shock
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Topics: Microbeams, Microelectromechanical systems, Shock (Mechanics), Vibration, Cantilevers
Journal Articles

Fabrication and Energy Harvesting Measurements of Vibrating MEMS Piezoelectric Benders

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Changki Mo, Ryan R. Knight, Amanda A. Frederick, William W. Clark
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research Papers
J. Vib. Acoust. February 2011, 133(1): 011006.
https://doi.org/10.1115/1.4002784
Published Online: December 17, 2010
View Articletitled, Fabrication and Energy Harvesting Measurements of Vibrating MEMS Piezoelectric Benders
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Topics: Electrodes, Energy harvesting, Manufacturing, Microelectromechanical systems, Stress, Cantilevers
Journal Articles

Analytical Modeling and Experimental Verification of the Vibrations of the Zigzag Microstructure for Energy Harvesting

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M. Amin Karami, Daniel J. Inman
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research Papers
J. Vib. Acoust. February 2011, 133(1): 011002.
https://doi.org/10.1115/1.4002783
Published Online: December 8, 2010
View Articletitled, Analytical Modeling and Experimental Verification of the Vibrations of the Zigzag Microstructure for Energy Harvesting
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Topics: Energy harvesting, Equilibrium (Physics), Microelectromechanical systems, Vibration, Mode shapes, Cantilevers, Free vibrations, Design, Modeling, Deflection
Journal Articles

Input and Design Optimization Under Uncertainty to Minimize the Impact Velocity of an Electrostatically Actuated MEMS Switch

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M. S. Allen, J. E. Massad, R. V. Field, Jr., C. W. Dyck
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research Papers
J. Vib. Acoust. April 2008, 130(2): 021009.
https://doi.org/10.1115/1.2827981
Published Online: February 6, 2008
View Articletitled, Input and Design Optimization Under Uncertainty to Minimize the Impact Velocity of an Electrostatically Actuated MEMS Switch
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Topics: Design, Optimization, Switches, Uncertainty, Microelectromechanical systems
Journal Articles

On the Fundamental Transverse Vibration Frequency of a Free-Free Thin Beam With Identical End Masses

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A. Erturk, D. J. Inman
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Technical Papers
J. Vib. Acoust. October 2007, 129(5): 656–662.
https://doi.org/10.1115/1.2776341
Published Online: May 23, 2007
View Articletitled, On the Fundamental Transverse Vibration Frequency of a Free-Free Thin Beam With Identical End Masses
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Topics: Curve fitting, Energy harvesting, Errors, Oscillating frequencies, Polynomials, Vibration, Cantilevers, Microelectromechanical systems
Journal Articles

Tunable Microelectromechanical Filters that Exploit Parametric Resonance

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Jeffrey F. Rhoads, Steven W. Shaw, Kimberly L. Turner, Rajashree Baskaran
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Technical Papers
J. Vib. Acoust. October 2005, 127(5): 423–430.
https://doi.org/10.1115/1.2013301
Published Online: January 10, 2005
View Articletitled, Tunable Microelectromechanical Filters that Exploit Parametric Resonance
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Topics: Filters, Resonance, Microelectromechanical systems, Excitation, Filtration
Journal Articles

Foreword

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Larry Bergman
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Foreword
J. Vib. Acoust. July 2004, 126(3): 325.
https://doi.org/10.1115/1.1777226
Published Online: July 30, 2004
View Articletitled, Foreword
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Topics: Acoustics, Dynamics (Mechanics), Microelectromechanical systems, Modeling, Artificial neural networks, Deformation, Engineering disciplines, Fluids, Microscale devices
Journal Articles

On the Nonlinear Dynamics of Tether Suspensions for MEMS

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Wyatt O. Davis, Assoc. Mem. ASME, Oliver M. O’Reilly, Albert P. Pisano, Mem. ASME
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Technical Papers
J. Vib. Acoust. July 2004, 126(3): 326–331.
https://doi.org/10.1115/1.1760558
Published Online: July 30, 2004
View Articletitled, On the Nonlinear Dynamics of Tether Suspensions for MEMS
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Topics: Boundary-value problems, Microelectromechanical systems, Nonlinear dynamics, Resonance, Torque, Rotors, Vibration, Displacement, Frequency response, Shear (Mechanics)
Journal Articles

Nonlinear Dynamics of a Micro-Electro-Mechanical System With Time-Varying Capacitors

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Albert C. J. Luo, Mem. ASME, Fei-Yue Wang
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Technical Papers
J. Vib. Acoust. January 2004, 126(1): 77–83.
https://doi.org/10.1115/1.1597211
Published Online: February 26, 2004
View Articletitled, Nonlinear Dynamics of a Micro-Electro-Mechanical System With Time-Varying Capacitors
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Topics: Capacitors, Microelectromechanical systems, Resonance, Nonlinear dynamics, Excitation