Feedforward Feedback Linearization Linear Quadratic Gaussian With Loop Transfer Recovery Control of Piezoelectric Actuator in Active Vibration Isolation System

Hysteresis exists widely in intelligent materials, such as piezoelectric and giant magnetostrictive ones, and it significantly affects the precision of vibration control when a controlled object moves at a range of micrometers or even smaller. Many measures must be implemented to eliminate the influence of hysteresis. In this work, the hysteresis characteristic of a proposed piezoelectric actuator (PEA) is tested and modeled based on the adaptive neuro fuzzy inference system (ANFIS). A linearization control method with feedforward hysteresis compensation and proportional–integral–derivative (PID) feedback is established and simulated. A linear quadratic Gaussian with loop transfer recovery (LQG/LTR) regulator is then designed as a vibration controller. Verification experiments are conducted to evaluate the effectiveness of the control method in vibration isolation. Experiment results demonstrate that the proposed vibration control system with a feedforward feedback linearization controller and an LQG/LTR regulator can significantly improve the performance of a vibration isolation system in the frequency range of 5–200 Hz with low energy consumption.