Nanocomposite coatings of have been prepared by ion beam assisted deposition (IBAD): simultaneous sputtering of Ti and Si targets and film bombardment by ions at 1000 eV. The Si/Ti ratio in the film varies from 0 to 0.9. The coatings are composed of amorphous and TiN nanocrystals with grain size of several nanometers. Such nanocomposites exhibit improved mechanical properties in comparison with TiN or deposited under the same conditions. The nanoindentation hardness of film at the Si/Ti ratio of 0.3 reaches a maximum of 42 GPa, compared with 22 GPa for TiN and 18 GPa for The wear resistance of AISI 52100 steel coated with these nanocomposite coatings is increased about three times.
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