The mechanical properties of SiC films grown via C60 precursors were determined using atomic force microscopy (AFM). Conventional silicon nitride and diamond-tipped steel AFM cantilevers were employed to determine the film hardness, friction coefficient, and elastic modulus. The hardness is found to be 26 GPa by nanoindentation of the film with a Berkovich diamond tip. The friction coefficient for the silicon nitride tip on the SiC film is about one half to one third that for silicon nitride sliding on a silicon substrate. By combining nanoindentation and AFM measurements an elastic modulus of ~300 GPa is estimated for these SiC films.

Issue Section:
Research Papers
Topics:
Atomic force microscopy, Silicon nitride ceramics, Diamonds, Elastic moduli, Friction, Nanoindentation, Cantilevers, Mechanical properties, Silicon, Steel
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