Although friction force measurements using one sensor to detect both the normal deflection and rotation angle of a scanning probe are convenient and popular, the critical issues regarding the calibration of the instruments have not been fully studied. A Lateral Force Microscope (LFM), modified from the Point Contact Microscope (PCM), is used to simultaneously measure the surface topography and friction force. An optical head is used to measure the normal bending deflection and rotation angle of the cantilever that carries the diamond tip. Emphasis is put on the development of reliable calibration procedures for obtaining the normal deflection and rotation sensitivities of the optical head as well as the spring constants in the bending and torsion modes. The friction loop, which is essential for friction measurements, is investigated in detail. The LFM is used to measure a two-phase composite to show its ability to distinguish different materials on a surface. Wear tests on a single-crystal silicon <100> surface show different friction coefficient regimes, depending on the applied load. For small loads, there is no wear and the friction coefficient is constant. For larger loads, the friction coefficient and wear depth increase with normal load.

Issue Section:
Research Papers
Topics:
Friction, Microscopes, Stress, Deflection, Rotation, Calibration, Wear, Cantilevers, Composite materials, Crystals, Diamonds, Elastic constants, Force measurement, Instrumentation, Probes, Sensors, Silicon, Torsion, Wear testing
1.
Annis
B. K.
, and
Pedraza
D. F.
,
1993
, “
Effect of Friction on Atomic Force Microscopy of Ion Implanted Highly Oriented Pyrolytic Graphite
,”
Journal of Vacuum Science and Technology, B
, Vol.
11
, No.
5
, pp.
1759
–
1765
.
2.
Binnig
G.
,
Quate
C. F.
, and
Gerber
Ch.
,
1986
, “
Atomic Force Microscope
,”
Physics Review Letters
, Vol.
56
, No.
9
, pp.
930
–
933
.
3.
Bogy
D.
,
Yun
X.
, and
Knapp
B. J.
,
1994
, “
Enhancement of Head-Disl Interface Durability by Use of Diamond-Like Carbon Overcoats on the Slider’s Rail
,”
IEEE Transactions on Magnetics
, Vol.
30
, No.
2
, pp.
2148
–
2153
.
4.
Grafstrom
S.
,
Neitzert
M.
,
Hagen
T.
,
Ackermann
J.
,
Neumann
R.
,
Probst
O.
, and
Wortge
M.
,
1993
, “
The Role of Topography and Friction for the Image Contrast in Lateral Force Microscopy
,”
Nanotechnology
, Vol.
4
, No.
3
, pp.
143
–
151
.
5.
Kaneko
R.
,
Nonaka
N.
, and
Yasuda
K.
,
1988
, “
Atomic Force Microscope for Microtribology
,
Journal of Vacuum Science and Technology
, Series A,
6
(
2
), pp.
291
–
292
.
6.
Kaneko
R.
,
Miyamoto
T.
, and
Hamada
E.
,
1991
, “
Development of a Controlled Frictional Force Microscope and Imaging of Recording Disk Surfaces
,”
Advanced Information Storage System
, Vol.
1
, pp.
267
–
277
.
7.
Kohno
T.
,
Ozawa
N.
,
Miyamoto
K.
, and
Musha
T.
,
1988
, “
High Precision Optical Surface Sensor
,”
Applied Optics
, Vol.
27
, No.
1
, pp.
103
–
108
.
8.
Marti
O.
,
Colchero
J.
, and
Mlynek
J.
,
1990
, “
Combined Scanning Force and Friction Microscopy of Mica
,”
Nanotechnology
, Vol.
1
, No.
2
, pp.
145
–
151
.
9.
Marti, C., Colchero, J., and Mlynek, J., 1993, “Friction and Forces on an Atomic Scale,” Nanosources and Manipulation of Atoms under High Fields and Temperature: Application, Vu Thien Binh, N. Garcia, and K. Dransfeld, eds., Kluwer Academic Publishers, London, UK.
10.
Mate
C. M.
,
McClelland
G. M.
,
Erlandsson
R.
, and
Chiang
S.
,
1987
, “
Atomical-Scale Friction of a Tungsten Tip on a Graphite Surface
,”
Physical Review Letters
, Vol.
59
, No.
17
, pp.
1942
–
1945
.
11.
Mate
CM.
,
1992
, “
Atomic-Force-Microscope Study of Polymer Lubricants on Silicon Surfaces
,”
Physical Review Letters
, Vol.
68
, No.
22
, pp.
3323
–
3326
.
12.
Meyer
G.
, and
Amer
N.
,
1990
, “
Simultaneous Measurement of Lateral and Normal Forces with an Optical-Beam-Deflection Atomic Force Microscope
,”
Applied Physics Letters
, Vol.
57
, No.
20
, pp.
2089
–
2091
.
13.
Miyamoto, T., Kaneko, R., and Andoh, Y., 1991, “Microscopic Adhesion and Friction between a Sharp Diamond Tip and Al2O3-TiC,” ASME Advances in Information and Storage Systems, Vol. 2, pp. 11–21.
14.
Miyamoto
T.
,
Miyake
S.
, and
Kaneko
R.
,
1993
, “
Wear Resistance of C+-implanted Silicon Investigated by Scanning Probe Microscopy
,”
Wear
, Apr. 13, Vol.
162
, pp.
733
–
738
.
15.
Neubauer
G.
,
Cohen
S.
,
McClelland
G.
,
Home
D.
, and
Mate
C.
,
1990
, “
Force Microscopy With Bidirectional Capacitance Sensor
,”
Review of Scientific Instruments
, Vol.
61
, No.
9
, pp.
2296
–
2308
.
16.
O’Shea
S. J.
,
Welland
M. E.
, and
Rayment
T.
,
1992
, “
Atomic Force Microscope Study of Boundary Layer Lubrication
,”
Applied Physics Letters
, Vol.
61
, No.
18
, pp.
2240
–
2242
.
17.
Overney, R., and Meyer, E., 1993, “Tribological Investigations Using Friction Force Microscopy,” MRS Bulletin, May, pp. 26–34.
18.
Ruan, J.-A., and Bhushan, B., 1994, “Atomic-Scale Friction Measurements Using Friction Force Microscopy: Part I-General Principles and New Measurement Techniques,” ASME JOURNAL OF TRIBOLOGY, to appear.
19.
Thundat
T.
,
Warmack
R. J.
,
Allison
D. P.
,
Bottomley
L. A.
,
Lourenco
A. J.
, and
Ferrel
T. L.
,
1992
, “
Atomic Force Microscopy of Deoxyrbonuoleic Acid Strands Adsorbed on Mica: The Effect of Humidity on Apparent Width and Image Contrast
,”
Journal of Vacuum Science and Technology
, Series A, Vol.
10
, No.
4
, pp.
630
–
635
.
20.
Yanagisawa
M.
, and
Motomura
Y.
,
1987
, “
An Ultramicro Mentation Hardness Tester and Its Application to Thin Films
,”
Lubrication Engineering
, Vol.
43
, No.
1
, pp.
52
–
56
.
This content is only available via PDF.
Copyright © 1995
 by The American Society of Mechanical Engineers
You do not currently have access to this content.