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Nick G. Glumac
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Proceedings Papers

Metal Monoxide Diagnostics in Particle Synthesis Flames

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Yijia Chen, Andrei Colibaba-Evulet, Nick G. Glumac
Proc. ASME. IMECE2000, Heat Transfer: Volume 5, 1-5, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1552
https://doi.org/10.1115/IMECE2000-1552
View Paper titled, Metal Monoxide Diagnostics in Particle Synthesis Flames
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Topics: Flames, Metals, Particulate matter, Emissions, Pressure
Proceedings Papers

Mixed Convection in a Large Area Atmospheric Pressure CVD Reactor

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S. P. Vanka, Gang Luo, Nick G. Glumac
Proc. ASME. HT-FED2004, Volume 3, 901-911, July 11–15, 2004
Publisher: American Society of Mechanical Engineers
Paper No: HT-FED2004-56231
https://doi.org/10.1115/HT-FED2004-56231
View Paper titled, Mixed Convection in a Large Area Atmospheric Pressure CVD Reactor
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Topics: Atmospheric pressure, Chemical vapor deposition, Mixed convection, Flow (Dynamics), Geometry, Corners (Structural elements), Semiconductor wafers, Shear (Mechanics), Damping, Nozzles
Proceedings Papers

Suppression of Buoyancy in a Prototypical CVD Reactor by Geometry Modification

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S. P. Vanka, Gang Luo, Nick G. Glumac
Proc. ASME. HT2003, Heat Transfer: Volume 3, 117-125, July 21–23, 2003
Publisher: American Society of Mechanical Engineers
Paper No: HT2003-47180
https://doi.org/10.1115/HT2003-47180
View Paper titled, Suppression of Buoyancy in a Prototypical CVD Reactor by Geometry Modification
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Topics: Buoyancy, Chemical vapor deposition, Geometry, Flow (Dynamics), Gases, Atmospheric pressure, Fluid dynamics, Hardware, Low temperature, Pressure
Journal Articles

Numerical Study of Mixed Convection Flow in an Impinging Jet CVD Reactor for Atmospheric Pressure Deposition of Thin Films

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S. P. Vanka, Gang Luo, Nick G. Glumac
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Technical Papers
J. Heat Mass Transfer. October 2004, 126(5): 764–775.
https://doi.org/10.1115/1.1795232
Published Online: November 16, 2004
View Articletitled, Numerical Study of Mixed Convection Flow in an Impinging Jet CVD Reactor for Atmospheric Pressure Deposition of Thin Films
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Topics: Chemical vapor deposition, Flow (Dynamics), Rotation, Temperature, Pressure, Stagnation flow, Thin films, Mixed convection, Semiconductor wafers
Journal Articles

Control of Thin Film Growth in Chemical Vapor Deposition Manufacturing Systems: A Feasibility Study

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Wilson K. S. Chiu, Yogesh Jaluria, Nick G. Glumac
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2002, 124(3): 715–724.
https://doi.org/10.1115/1.1465434
Published Online: July 11, 2002
View Articletitled, Control of Thin Film Growth in Chemical Vapor Deposition Manufacturing Systems: A Feasibility Study
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Topics: Chemical vapor deposition, Design, Optimization, Temperature, Thin films, Computer simulation