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Proceedings Papers

Liquid Mass Flow Sensor Using Dynamic Pressure Detection

M. Ashauer, H. Glosch, H. Ashauer, H. Sandmaier, W. Lang
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 421-425, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1279
https://doi.org/10.1115/IMECE1998-1279
View Paper titled, Liquid Mass Flow Sensor Using Dynamic Pressure Detection
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Topics: Flow sensors, Pressure, Sensors, Dimensions, Engineering prototypes, Flow (Dynamics), Pressure sensors, Silicon
Proceedings Papers

Thermal Flow Sensor for Liquids and Gases

M. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier, W. Lang
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 427-432, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1280
https://doi.org/10.1115/IMECE1998-1280
View Paper titled, Thermal Flow Sensor for Liquids and Gases
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Topics: Flow sensors, Gases, Pollution, Sensors
Proceedings Papers

Stand Alone Micro Liquid Dosing System

R. Roßberg, H. Sandmaier, S. Büttgenbach
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 179-186, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1240
https://doi.org/10.1115/IMECE1998-1240
View Paper titled, Stand Alone Micro Liquid Dosing System
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Topics: Actuators, Batteries, Control systems, Electronics, Flow (Dynamics), Micromachining, Polishing equipment, Pressure, Reservoirs, Resonance
Proceedings Papers

Microfluidic Level Sensors

M. Sesterhenn, T. Strobelt, H. Ashauer, G. Raffa, H. Sandmaier, M. Schmitt
Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 397-403, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1122
https://doi.org/10.1115/IMECE2000-1122
View Paper titled, Microfluidic Level Sensors
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Topics: Microfluidics, Sensors, Signals, Electrolytes, Resolution (Optics), Bubbles, Capacitors, Design, Electrical conductance, Electronics
Proceedings Papers

Energy Optimized Valve With Low Leakage Rates

T. Strobelt, M. Willmann, J. Kohnle, G. Waibel, H. Sandmaier, R. Zengerle
Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 545-548, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1144
https://doi.org/10.1115/IMECE2000-1144
View Paper titled, Energy Optimized Valve With Low Leakage Rates
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Topics: Leakage, Valves, Batteries, Biomedicine, Energy consumption, Glass, Plastics, Silicon