The micro-ultrasonic machining (USM) is suitable for machining hard and brittle materials. When a micro hole is drilled deeply using micro-USM, machining speed slows down and the breakage of micro tool may occur. To solve this problem, this paper proposes the application the planetary movement of micro tool in high-aspect ratio micro holes drilling by micro-USM. The micro holes of about 92 μm in diameter with an aspect ratio larger than ten have been machined. The processing efficiency has been improved. The influence of planetary movement parameters on processing efficiency has been investigated
Issue Section:
Special Section Papers
Topics:
Machining
References
1.
Masuzawa
, T.
, 2000
, “State of the Art of Micromachining
,” Ann. CIRP
, 49
(2
), pp. 473
–488
.2.
An
, C. M.
, Yin
, G. Q.
, Li
, J. Z.
, and Yu
, Z. Y.
, 2011
, “Study of Micro Hole, Hole Array and 3D Micro Cavity Machined by USM
,” Electromach. Mould
, 1
, pp. 23
–27
(in Chinese).3.
Tateishi
, T.
, Yoshihara
, N.
, Yan
, J.
, and Kuriyagawa
, T.
, 2009
, “Fabrication of High-Aspect Ratio Micro Holes on Hard Brittle materials-Study on Electrorheological Fluid-Assisted Micro Ultrasonic Machining
,” Key Eng. Mater.
, 389–390
, pp. 264
–270
.4.
Kumar
, S.
, and Dvivedi
, A.
, 2018
, “Fabrication of Microchannels Using Rotary Tool Micro-USM: An Experimental Investigation on Tool Wear Reduction and Form Accuracy Improvement
,” J. Manuf. Processes
, 32
, pp. 802
–815
.5.
Kuriakose
, S.
, Patowari
, P. K.
, and Bhatt
, J.
, 2017
, “Machinability Study of Zr-Cu-Ti Metallic Glass by Micro Hole Drilling Using Micro-USM
,” J. Mater. Process. Technol.
, 240
, pp. 42
–51
.6.
Schorderet
, A.
, Deghilage
, E.
, and Agbeviade
, K.
, 2013
, “Tool Type and Hole Diameter Influence in Deep Ultrasonic Drilling of Micro-Holes in Glass
,” Procedia CIRP
, 6
, pp. 565
–570
.7.
Lv
, Z. W.
, 2012
, “Numerical Simulation and Machining Parameter Optimization of Micro Hole Drilling Aided With Planetary Movement of Electrode by Micro EDM
,” Master dissertation, Dalian University of Technology, Ganjingzi Qu, China (in Chinese).8.
Yu
, Z. Y.
, Zhang
, Y.
, Li
, J.
, Luan
, J.
, Zhao
, F.
, and Guo
, D.
, 2009
, “High Aspect Ratio Micro-Hole Drilling Aided With Ultrasonic Vibration and Planetary Movement of Electrode by Micro-EDM
,” Ann. CIRP
, 58
(1
), pp. 213
–216
.9.
Masuzawa
, T.
, Fujino
, M.
, Kobayashi
, K.
, Suzuki
, T.
, and Kinoshita
, N.
, 1985
, “Wire Electrodischarge Grinding for Micro-Machining
,” Ann. CIRP
, 34
(1
), pp. 431
–434
.10.
Egashira
, K.
, and Masuzawa
, T.
, 1999
, “Microultrasonic Machining by the Application of Workpiece Vibration
,” CIRP Ann. Manuf. Technol.
, 48
(1
), pp. 131
–134
.11.
Hu
, X.
, Yu
, Z. Y.
, and Rajurkar
, K. P.
, 2006
, “State-of-the-Art Review of Micro Ultrasonic Machining
,” ASME
Paper No. MSEC2006-21118.Copyright © 2019 by ASME
You do not currently have access to this content.
