... in detail. A complete test methodology has also been devised for the proposed nonresonant 3-DoF gyroscope. A cost effective commercially available metal-multi user MEMS process is used to fabricate a 20 μm thick nickel based micromachined vibratory gyroscope with an overall chip size of 2.2 mm × 2.6 mm...

... vibrations. Passive micromachined silicon low-pass filter structures (spring-mass-damper) have been demonstrated in recent years. However, the performance of these filter structures is typically limited by low damping. This is especially true if operated in low pressure environments, which is often...

... such mechanisms. The motivation of this work is to increase the sensitivity of a micromachined capacitive accelerometer and a minute mechanical force sensor using DaCMs. A lumped spring-mass-lever (SML) model, which effectively captures the effects of appending a DaCM to a sensor, is introduced. This model...

...Craig P. Lusk; Larry L. Howell Microelectromechanical systems (MEMS) are usually fabricated using planar processing methods such as surface micromachining, bulk micromachining, or LIGA-type fabrication. If a micro mechanism is desired that has motion out of the plane of fabrication, it can...