... the optimal operating environment for the attached device that requires vibration isolation. An active micromachined vibration isolator can be realized by combining a state sensor, and electrostatic actuator and feedback electronics with the passive isolator. Using this approach, a prototype active...

.... 1615-147X , 19 ( 2 ), pp. 93 – 104 . 26 06 2005 06 12 2005 electrostatic actuators design engineering optimisation springs (mechanical) Most actuators possess a finite passive stiffness. Consequently, for a given stimulus...