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Journal Articles

Mechanically Amplified 3-DoF Nonresonant Microelectromechanical Systems Gyroscope Fabricated in Low Cost MetalMUMPs Process

Rana I. Shakoor, Shafaat A. Bazaz, M. Mubasher Saleem
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. November 2011, 133(11): 111002.
https://doi.org/10.1115/1.4004790
Published Online: November 11, 2011
View Article titled, Mechanically Amplified 3-DoF Nonresonant Microelectromechanical Systems Gyroscope Fabricated in Low Cost MetalMUMPs Process
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Topics: Damping, Design, Design engineering, Engineering prototypes, Frequency response, Manufacturing, Microelectromechanical systems, Microgyroscopes, Micromachining, Resonance
Journal Articles

Active Vibration Control and Isolation for Micromachined Devices

Seong Jin Kim, Robert Dean, George Flowers, Chen Chen
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. September 2009, 131(9): 091002.
https://doi.org/10.1115/1.3159042
Published Online: August 17, 2009
View Article titled, Active Vibration Control and Isolation for Micromachined Devices
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Topics: Damping, Electrodes, Electrostatic actuators, Feedback, Filters, Microelectromechanical systems, Micromachining, Sensors, Vibration isolation, Vibration isolators
Journal Articles

Evaluation and Design of Displacement-Amplifying Compliant Mechanisms for Sensor Applications

Girish Krishnan, G. K. Ananthasuresh
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. October 2008, 130(10): 102304.
https://doi.org/10.1115/1.2965599
Published Online: September 9, 2008
View Article titled, Evaluation and Design of Displacement-Amplifying Compliant Mechanisms for Sensor Applications
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Topics: Accelerometers, Design, Displacement, Force sensors, Optimization, Sensors, Topology, Micromachining, Compliant mechanisms, Springs
Journal Articles

Mechanical Design of Compliant Microsystems—A Perspective and Prospects

G. K. Ananthasuresh, Larry L. Howell
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Introduction
J. Mech. Des. July 2005, 127(4): 736–738.
https://doi.org/10.1115/1.1900150
Published Online: February 14, 2005
View Article titled, Mechanical Design of Compliant Microsystems—A Perspective and Prospects
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Topics: Design, Design engineering, Microelectromechanical systems, Micromechanical devices, Micromachining
Journal Articles

Design and Fabrication of Microelectromechanical Systems

S. Kota, G. K. Ananthasuresh, S. B. Crary, K. D. Wise
Journal: Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. December 1994, 116(4): 1081–1088.
https://doi.org/10.1115/1.2919490
Published Online: December 1, 1994
View Article titled, Design and Fabrication of Microelectromechanical Systems
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Topics: Design, Manufacturing, Microelectromechanical systems, Micromachining, Micromechanical devices, Sensors, Boron, Circuits, Compliant mechanisms, Dimensions