This paper presents a new concept flexure hinge for MEMS applications and reveals how to design, construct, and experimentally test. This hinge combines a curved beam, as a flexible element, and a pair of conjugate surfaces, whose contact depends on load conditions. The geometry is conceived in such a way that minimum stress conditions are maintained within the flexible beam. A comparison of the new design with the other kind of revolute and flexible joints is presented. Then, the static behavior of the hinge is analyzed by means of a theoretical approach, based on continuum mechanics, and the results are compared to those obtained by means of finite element analysis (FEA) simulation. A silicon hinge prototype is also presented and the construction process, based on single step lithography and reactive ion etching (RIE) technology, is discussed. Finally, a crucial in–SEM experiment is performed and the experimental results are interpreted through the theoretical models.
Issue Section:
Mechanisms and Robotics
References
1.
Wang
, D.
, Yang
, Q.
, and Dong
, H.
, 2013
, “A Monolithic Compliant Piezoelectric-Driven Microgripper: Design, Modeling, and Testing
,” IEEE/ASME Trans. Mech.
, 18
(1
), pp. 138
–147
.10.1109/TMECH.2011.21632002.
Belfiore
, N. P.
, Verotti
, M.
, Crescenzi
, R.
, and Balucani
, M.
, 2013
, “Design, Optimization and Construction of MEMS Based Micro Grippers for Cell Manipulation
,” IEEE International Conference on System Science and Engineering
, ICSSE 2013, IEEE
, Budapest, Hungary, July 4–6, pp. 105
–110
.10.1109/ICSSE.2013.66146423.
Yi
, B.-J.
, Chung
, G. B.
, Na
, H. Y.
, Kim
, W. K.
, and Suh
, I. H.
, 2003
, “Design and Experiment of a 3-DOF Parallel Micromechanism Utilizing Flexure Hinges
,” IEEE Trans. Rob. Autom.
, 19
(4
), pp. 604
–612
.10.1109/TRA.2003.8145114.
Tian
, Y.
, and Shirinzadeh
, B.
, 2009
, “Development of a Flexure-Based 3-RRR Parallel Mechanism for Nano-Manipulation
,” IEEE/ASME International Conference on Advanced Intelligent Mechatronics
, Singapore, July 14–17, AIM 2009, IEEE
, July 4–6, pp. 1324
–1329
.10.1109/AIM.2009.52298725.
Belfiore
, N. P.
, EmamiMeibodi
, M.
, Verotti
, M.
, Crescenzi
, R.
, Balucani
, M.
, and Nenzi
, P.
, 2013
, “Kinetostatic Optimization of a MEMS Based Compliant 3 DOF Plane Parallel Platform
,” IEEE 9th International Conference on Computational Cybernetics
, ICCC 2013, IEEE
, Tihany, Hungary, July 8–10, pp. 261
–266
.10.1109/ICCCyb.2013.66176006.
Bashash
, S.
, and Jalili
, N.
, 2009
, “Robust Adaptive Control of Coupled Parallel Piezo-Flexural Nanopositioning Stages
,” IEEE/ASME Trans. Mech.
, 14
(1
), pp. 11
–20
.10.1109/TMECH.2008.20065017.
Polit
, S.
, and Dong
, J.
, 2011
, “Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-Nanomanufacturing
,” IEEE/ASME Trans. Mech.
, 16
(4
), pp. 724
–733
.10.1109/TMECH.2010.20521078.
Xu
, Q.
, 2012
, “Design and Development of a Flexure-Based Dual-Stage Nanopositioning System With Minimum Interference Behavior
,” IEEE Trans. Autom. Sci. Eng.
, 9
(3
), pp. 554
–563
.10.1109/TASE.2012.21989189.
Howell
, L.
, 2001
, Compliant Mechanisms
, Wiley-Interscience
, New York.10.
Lobontiu
, N.
, 2010
, Compliant Mechanisms: Design of Flexure Hinges
, CRC
, Boca Raton, FL.11.
Pei
, X.
, Yu
, J.
, Zong
, G.
, Bi
, S.
, and Su
, H.
, 2009
, “The Modeling of Cartwheel Flexural Hinges
,” Mech. Mach. Theory
, 44
(10
), pp. 1900
–1909
.10.1016/j.mechmachtheory.2009.04.00612.
Cannon
, J.
, and Howell
, L.
, 2005
, “A Compliant Contact-Aided Revolute Joint
,” Mech. Mach. Theory
, 40
(11
), pp. 1273
–1293
.10.1016/j.mechmachtheory.2005.01.01113.
Bellouard
, Y.
, 2010
, Microrobotics: Methods and Applications
, CRC
, Boca Raton, FL.14.
Bazaz
, S. A.
, Khan
, F.
, and Shakoor
, R. I.
, 2011
, “Design, Simulation and Testing of Electrostatic SOI Mumps Based Microgripper Integrated With Capacitive Contact Sensor
,” Sens. Actuators, A
, 167
(1
), pp. 44
–53
.10.1016/j.sna.2010.12.00315.
Beyeler
, F.
, Neild
, A.
, Oberti
, S.
, Bell
, D.
, Sun
, Y.
, Dual
, J.
, and Nelson
, B.
, 2007
, “Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field
,” J. Microelectromech. Syst.
, 16
(1
), pp. 7
–15
.10.1109/JMEMS.2006.88585316.
Chen
, G.-M.
, Jia
, J.-Y.
, and Li
, Z.-W.
, 2005
, “On Hybrid Flexure Hinges
,” Proceedings on Networking, Sensing and Control
, IEEE
, Tucson, AZ, Mar. 19–22, pp. 700
–704
.10.1109/ICNSC.2005.146127517.
Lee
, V.
, Gibert
, J.
, and Ziegert
, J.
, 2013
, “Hybrid Bi-Directional Flexure Joint
,” Precis. Eng.
, 38
(2
), pp. 270
–278
.10.1016/j.precisioneng.2013.10.00118.
Yong
, Y. K.
, Lu
, T.-F.
, and Handley
, D. C.
, 2008
, “Review of Circular Flexure Hinge Design Equations and Derivation of Empirical Formulations
,” Precis. Eng.
, 32
(2
), pp. 63
–70
.10.1016/j.precisioneng.2007.05.00219.
Lobontiu
, N.
, Garcia
, E.
, Goldfarb
, M.
, and Paine
, J. S.
, 2001
, “Corner-Filleted Flexure Hinges
,” ASME J. Mech. Des.
, 123
(3
), pp. 346
–352
.10.1115/1.137219020.
Lobontiu
, N.
, Paine
, J. S.
, O'Malley
, E.
, and Samuelson
, M.
, 2002
, “Parabolic and Hyperbolic Flexure Hinges: Flexibility, Motion Precision and Stress Characterization Based on Compliance Closed-Form Equations
,” Precis. Eng.
, 26
(2
), pp. 183
–192
.10.1016/S0141-6359(01)00108-821.
Smith
, S. T.
, Badami
, V. G.
, Dale
, J. S.
, and Xu
, Y.
, 1997
, “Elliptical Flexure Hinges
,” Rev. Sci. Instrum.
, 68
(3
), pp. 1474
–1483
.10.1063/1.114763522.
Xu
, P.
, Jingjun
, Y.
, Guanghua
, Z.
, and Shusheng
, B.
, 2008
, “The Stiffness Model of Leaf-Type Isosceles-Trapezoidal Flexural Pivots
,” ASME J. Mech. Des.
, 130
(8
), p. 082303
.10.1115/1.293690223.
Zhang
, S.
, and Fasse
, E.
, 2001
, “A Finite-Element-Based Method to Determine the Spatial Stiffness Properties of a Notch Hinge
,” ASME J. Mech. Des.
, 123
(1
), pp. 141
–147
.10.1115/1.134215724.
Chen
, G.
, Liu
, X.
, and Du
, Y.
, 2011
, “Elliptical-Arc-Fillet Flexure Hinges: Toward a Generalized Model for Commonly Used Flexure Hinges
,” ASME J. Mech. Des.
, 133
(8
), p. 081002
.10.1115/1.400444125.
Lobontiu
, N.
, 2012
, “Symmetry-Based Compliance Model of Multisegment Notch Flexure Hinges
,” Mech. Based Des. Struct. Mach.
, 40
(2
), pp. 185
–205
.10.1080/15397734.2011.62916626.
Chen
, G.
, Wang
, J.
, and Liu
, X.
, 2014
, “Generalized Equations for Estimating Stress Concentration Factors of Various Notch Flexure Hinges
,” ASME J. Mech. Des.
, 136
(3
), p. 031009
.10.1115/1.402626527.
Zelenika
, S.
, Munteanu
, M.
, and De Bona
, F.
, 2009
, “Optimized Flexural Hinge Shapes for Microsystems and High-Precision Applications
,” Mech. Mach. Theory
, 44
(10
), pp. 1826
–1839
.10.1016/j.mechmachtheory.2009.03.00728.
Dirksen
, F.
, Anselmann
, M.
, Zohdi
, T.
, and Lammering
, R.
, 2013
, “Incorporation of Flexural Hinge Fatigue-Life Cycle Criteria Into the Topological Design of Compliant Small-Scale Devices
,” Precis. Eng.
, 37
(3
), pp. 531
–541
.10.1016/j.precisioneng.2012.12.00529.
Jensen
, B.
, and Howell
, L.
, 2002
, “The Modeling of Cross-Axis Flexural Pivots
,” Mech. Mach. Theory
, 37
(5
), pp. 461
–476
.10.1016/S0094-114X(02)00007-130.
Shusheng
, B.
, Hongzhe
, Z.
, and Jingjun
, Y.
, 2009
, “Modeling of a Cartwheel Flexural Pivot
,” ASME J. Mech. Des.
, 131
(6
), p. 061010
.10.1115/1.312520431.
Mankame
, N. D.
, and Ananthasuresh
, G.
, 2004
, “Topology Optimization for Synthesis of Contact-Aided Compliant Mechanisms Using Regularized Contact Modeling
,” Comput. Struct.
, 82
(15
), pp. 1267
–1290
.10.1016/j.compstruc.2004.02.02432.
Belfiore
, N. P.
, and Simeone
, P.
, 2013
, “Inverse Kinetostatic Analysis of Compliant Four-Bar Linkages
,” Mech. Mach. Theory
, 69
, pp. 350
–372
.10.1016/j.mechmachtheory.2013.06.00833.
Yong
, Y. K.
, and Lu
, T.-F.
, 2008
, “The Effect of the Accuracies of Flexure Hinge Equations on the Output Compliances of Planar Micro-Motion Stages
,” Mech. Mach. Theory
, 43
(3
), pp. 347
–363
.10.1016/j.mechmachtheory.2007.03.00734.
Belfiore
, N. P.
, Scaccia
, M.
, Ianniello
, F.
, and Presta
, M.
, 2009
, Selective Compliance Hinge
, WO/2009/034551, International Application No. PCT/IB2008/053697, Mar. 19.35.
Belfiore
, N.
, Scaccia
, M.
, Ianniello
, F.
, and Presta
, M. P. L.
, 2009
, Selective Compliance Wire Actuated Mobile Platform, Particularly for Endoscopiy Surgical Devices
, WO/2009/034552, International Application No. PCT/IB2008/053698, Mar. 19.36.
Cullmann
, K.
, 1880
, Traite de Statique Graphique
, Dunod, ed., Paris
.37.
Ferrari
, R.
, and Rizzi
, E.
, 2008
, “On the Theory of the Ellipse of Elasticity as a Natural Discretisation Method in the Design of Paderno d'adda Bridge (Italy)
,” Proceedings of the 6th International Conference on Structural Analysis of Historic Construction: Preserving Safety and Significance
, Bath, UK, July 2–4, CRC, pp. 583
–591
.38.
Tas
, N.
, Sonnenberg
, T.
, Jansen
, H.
, Legtenberg
, R.
, and Elwenspoek
, M.
, 1996
, “Stiction in Surface Micromachining
,” J. Micromech. Microeng.
, 6
(4
), p. 385
.10.1088/0960-1317/6/4/00539.
Komvopoulos
, K.
, 1996
, “Surface Engineering and Microtribology for Microelectromechanical Systems
,” Wear
, 200
(1
), pp. 305
–327
.10.1016/S0043-1648(96)07328-040.
Mastrangelo
, C.
, 1997
, “Adhesion-Related Failure Mechanisms in Micromechanical Devices
,” Tribol. Lett.
, 3
(3
), pp. 223
–238
.10.1023/A:101913322240141.
Maboudian
, R.
, and Howe
, R. T.
, 1997
, “Critical Review: Adhesion in Surface Micromechanical Structures
,” J. Vac. Sci. Technol., B
, 15
(1
), pp. 1
–20
.10.1116/1.58924742.
Rymuza
, Z.
, 1999
, “Control Tribological and Mechanical Properties of MEMS Surfaces. Part 1: Critical Review
,” Microsyst. Technol.
, 5
(4
), pp. 173
–180
.10.1007/s00542005016043.
Ashurst
, W. R.
, Yau
, C.
, Carraro
, C.
, Maboudian
, R.
, and Dugger
, M. T.
, 2001
, “Dichlorodimethylsilane as an Anti-Stiction Monolayer for MEMS: A Comparison to the Octadecyltrichlorosilane Self-Assembled Monolayer
,” J. Microelectromech. Syst.
, 10
(1
), pp. 41
–49
.10.1109/84.91109044.
Ashurst
, W. R.
, Yau
, C.
, Carraro
, C.
, Lee
, C.
, Kluth
, G. J.
, Howe
, R. T.
, and Maboudian
, R.
, 2001
, “Alkene Based Monolayer Films as Anti-Stiction Coatings for Polysilicon MEMS
,” Sens. Actuators, A
, 91
(3
), pp. 239
–248
.10.1016/S0924-4247(01)00593-345.
van Spengen
, W. M.
, Wijts
, G. H. C. J.
, Turq
, V.
, and Frenken
, J. W. M.
, 2010
, “Microscale Friction Reduction by Normal Force Modulation in MEMS
,” J. Adhes. Sci. Technol.
, 24
(15–16
), pp. 2669
–2680
.10.1163/016942410X50822646.
Belfiore
, N.
, Verotti
, M.
, and Consorti
, L.
, 2010
, “Comparative Analysis of Isotropy Indices in RR and RRP Arms
,” Int. J. Mech. Control
, 11
(1
), pp. 3
–12
.47.
Belfiore
, N.
, Di Giamberardino
, P.
, Rudas
, I.
, and Verotti
, M.
, 2011
, “Isotropy in Any RR Planar Dyad Under Active Joint Stiffness Regulation
,” Int. J. Mech. Control
, 12
(1
), pp. 75
–81
.48.
Belfiore
, N. P.
, Verotti
, M.
, Di Giamberardino
, P.
, and Rudas
, I. J.
, 2012
, “Active Joint Stiffness Regulation to Achieve Isotropic Compliance in the Euclidean Space
,” J. Mech. Rob.
, 4
(4
), p. 041010
.10.1115/1.400730749.
Petersen
, K. E.
, 1982
, “Silicon as a Mechanical Material
,” Proc. IEEE
, 70
(5
), pp. 420
–457
.10.1109/PROC.1982.1233150.
Hopcroft
, M. A.
, Nix
, W. D.
, and Kenny
, T. W.
, 2010
, “What Is the Young's Modulus of Silicon?
,” J. Microelectromech. Syst.
, 19
(2
), pp. 229
–238
.10.1109/JMEMS.2009.203969751.
Kota
, S.
, Joo
, J.
, Li
, Z.
, Rodgers
, S.
, and Sniegowski
, J.
, 2001
, “Design of Compliant Mechanisms: Applications to MEMS
,” Analog Integr. Circuits Signal Process.
, 29
(1
), pp. 7
–15
.10.1023/A:101126581047152.
Howell
, L.
, Midha
, A.
, and Norton
, T.
, 1996
, “Evaluation of Equivalent Spring Stiffness for Use in a Pseudo-Rigid-Body Model of Large-Deflection Compliant Mechanisms
,” ASME J. Mech. Des.
, 118
(1
), pp. 126
–131
.10.1115/1.282684353.
Belfiore
, N. P.
, 2014
, “Functional Synthesis of a New Class of Micro Electro-Mechanical Systems
,” Advances in Soft Computing, Intelligent Robotics and Control
. Vol. 8 (Topics in Intelligent Engineering and Informatics), Springer International Publishing
, pp. 81
–93
.54.
Freudenstein
, F.
, Bottema
, O.
, and Koetsier
, M.
, 1969
, “Finite Conic-Section Burmester Theory
,” J. Mech.
, 4
(4
), pp. 359
–373
.10.1016/0022-2569(69)90016-055.
Belfiore
, N. P.
, Prosperi
, G.
, and Crescenzi
, R.
, 2014
, “A Simple Application of Conjugate Profile Theory to the Development of a Silicon Micro Tribometer
,” Proceedings of ASME 2014 12th Biennial Conference on Engineering Systems Design and Analysis
, ASME, Copenhagen, Denmark, July 25–27.56.
Balucani
, M.
, Belfiore
, N. P.
, Crescenzi
, R.
, and Verotti
, M.
, 2011
, “The Development of a MEMS/NEMS-Based 3 D.O.F. Compliant Micro Robot
,” Int. J. Mech. Control
, 12
(1
), pp. 3
–10
.57.
Chang
, S.-L.
, and Tsai
, L.-W.
, 1990
, “On the Redundant - Drive Backlash - Free Robotic Mechanisms
,” ASME J. Mech. Des.
115
(2), pp. 247–254.58.
Nemeth
, N.
, Evans
, L.
, Jadaan
, O.
, Sharpe
, W.
, Beheim
, G.
, and Trapp
, M.
, 2007
, “Fabrication and Probabilistic Fracture Strength Prediction of High-Aspect-Ratio Single Crystal Silicon Carbide Microspecimens With Stress Concentration
,” Thin Solid Films
, 515
(6
), pp. 3283
–3290
.10.1016/j.tsf.2006.01.04159.
Merlijn Van Spengen
, W.
, 2012
, “Static Crack Growth and Fatigue Modeling for Silicon MEMS
,” Sens. Actuators, A
, 183
, pp. 57
–68
.10.1016/j.sna.2012.05.042Copyright © 2015 by ASME
You do not currently have access to this content.
