Manipulators of high accuracy and flexibility call for very strict requirements when their actuating mechanisms are downsized at the millimeter scale, which opens up the investigation of several novel actuator technologies such as those relying on piezoelectrics and shape memory alloys. In order to implement the precise and flexible operations, a new manipulator driven by a traveling wave ultrasonic motor and two inserted shape memory alloy actuators is presented. The structure and mechanism of the manipulator is introduced. After suitable material is selected, the prototype of the manipulator is fabricated. Finally, the experiments of the prototype are carried out to prove the property of the manipulator.

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