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Keywords: single-crystal silicon
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Eng. Mater. Technol. January 2012, 134(1): 011009.
Published Online: December 8, 2011
... that the developed biaxial tensile test device was able to accurately apply not only uniaxial but also biaxial tensile stress to a single-crystal silicon (SCS) film specimen. 23 05 2011 21 10 2011 08 12 2011 08 12 2011 deformation elemental semiconductors internal stresses Raman...
