... that the developed biaxial tensile test device was able to accurately apply not only uniaxial but also biaxial tensile stress to a single-crystal silicon (SCS) film specimen. 23 05 2011 21 10 2011 08 12 2011 08 12 2011 deformation elemental semiconductors internal stresses Raman...

... Sensors by Raman Spectroscopy ,” Sens. Actuators B , 126 ( 1 ), pp. 240 – 244 . 10.1016/j.snb.2006.12.002 31 03 2011 12 07 2011 20 10 2011 20 10 2011 atomic force microscopy cantilevers elemental semiconductors nanoindentation semiconductor doping silicon stress...

... brittleness cutting ductile-brittle transition elemental semiconductors micromachining plastic deformation sapphire semiconductor technology silicon critical depth of cut specific cutting energy microscribing process hard and brittle materials Scribing process is often applied before...

... for the disordered atomistic surfaces under consideration. silicon elemental semiconductors molecular dynamics method potential energy functions surface energy free energy stress-strain relations elastic moduli ion beam effects 04 02 2005 12 07 2005 Extensional strain in the plane...

.... 2 . silicon carbon elemental semiconductors vacancies (crystal) surface reconstruction Monte Carlo methods self-assembly 07 02 2005 08 05 2005 2005 American Society of Mechanical Engineers ...

.... Manuscript received January 27, 2004; revision received June 23, 2004. Review conducted by: A. Pelegri. 27 January 2004 23 June 2004 22 02 2005 silicon elemental semiconductors semiconductor thin films micromechanical devices plastic deformation failure (mechanical) creep...