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1-11 of 11
Keywords: thin films
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Journal Articles
Influence of Precursor Concentration on Crystalline Quality of GaN Thin Films Grown on a Sapphire Wafer
Available to Purchase
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. November 2021, 143(11): 111001.
Paper No: MANU-21-1071
Published Online: May 7, 2021
...Omar Dhannoon Jumaah; Yogesh Jaluria Chemical vapor deposition (CVD), which involves chemical reactions in gases for deposition on a heated surface, is an extensively used manufacturing technique for obtaining thin films of materials like silicon, graphene, silicon carbide, aluminum nitride...
Journal Articles
A Numerical and Experimental Study on the Fabrication GaN Films by Chemical Vapor Deposition
Available to Purchase
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. January 2020, 142(1): 011001.
Paper No: MANU-19-1264
Published Online: November 1, 2019
... susceptor and flow guide is considered. The focus is on gallium nitride (GaN) thin films. The study shows how the computational model can benefit reactor design. It also presents comparisons between model prediction results and experimental data from a physical, practical, system. Commercially available...
Journal Articles
Metal Embedded Optical Fiber Sensors: Laser-Based Layered Manufacturing Procedures
Available to Purchase
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2011, 133(3): 031015.
Published Online: June 16, 2011
... temperatures. The embedding process described in this paper consists of low temperature laser microdeposition of on-fiber silver thin films followed by nickel electroplating in a steel part. A microscale laser-based direct write (DW) method, called laser-assisted maskless microdeposition (LAMM), is employed...
Journal Articles
Assessment of Microbial Biofilm Growth on Nanocrystalline Diamond in a Continuous Perfusion Environment
Available to Purchase
Publisher: ASME
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030919.
Published Online: June 14, 2010
... will provide a better understanding of biomaterial-microorganism interaction and will enable the creation of enhanced antimicrobial biomaterials. biomedical materials CVD coatings nanostructured materials thin films nanocrystalline diamond biofilm chemical vapor deposition thin films...
Journal Articles
Design, Fabrication, and Characterization of Metal Embedded Microphotonic Sensors
Available to Purchase
Publisher: ASME
Article Type: Special Section: Micromanufacturing
J. Manuf. Sci. Eng. June 2008, 130(3): 031104.
Published Online: May 5, 2008
... at critical locations in metallic structures, which are heavily used in hostile manufacturing environments. This paper presents the study of design, fabrication, and characterization of integrated microring sensors. Various thin film optical materials were studied and single ring resonators were designed...
Journal Articles
Development of Cutting Tool With Built-In Thin Film Thermocouples for Measuring High Temperature Fields in Metal Cutting Processes
Available to Purchase
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. June 2008, 130(3): 034501.
Published Online: May 2, 2008
...Jun Shinozuka; Ali Basti; Toshiyuki Obikawa In order to measure temperature fields on tool face during cutting, a cutting tool with built-in thin film thermocouples (TFTs) has been devised. The TFTs composed of a nickel and nichrome thin films were fabricated on the rake face near the cutting edge...
Journal Articles
Response of Thin Films and Substrate to Micro-Scale Laser Shock Peening
Available to Purchase
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. June 2007, 129(3): 485–496.
Published Online: November 10, 2006
...Youneng Wang; Hongqiang Chen; Jeffrey W. Kysar; Y. Lawrence Yao Micro-scale laser shock peening ( μ LSP ) can potentially be applied to metallic structures in microdevices to improve fatigue and reliability performance. Copper thin films on a single-crystal silicon substrate are treated by using μ...
Journal Articles
Modeling Cutting: Plastic Deformation of Polymer Samples Indented With a Wedge
Available to Purchase
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. June 2007, 129(3): 477–484.
Published Online: November 1, 2006
.... The thin film was modeled using a polycarbonate rectangular block, which was indented with a metallic half-round wedge that represents the industrial cutter blades. The wedge radius and sample size were selected to scale to the ratio of slitting blade radius and industrial film thickness. A compression...
Journal Articles
A Simulation-based Correlation of Cross-Sectional Area of the Thin Film Produced by Laser Chemical Vapor Deposition With a Moving Laser Beam
Available to Purchase
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2004, 126(4): 796–800.
Published Online: February 4, 2005
...Yuwen Zhang, Associate Professor, A parametric study on shape and cross-sectional area of the thin film produced by Laser Chemical Vapor Deposition (LCVD) with a moving laser beam is presented. The problem is formulated in the coordinate system that moves with the laser beam, and, therefore...
Journal Articles
Statistical Process Control Based Supervisory Generalized Predictive Control of Thin Film Deposition Processes
Available to Purchase
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. February 2006, 128(1): 315–325.
Published Online: December 15, 2004
...Jionghua Jin; Huairui Guo; Shiyu Zhou This paper presents a supervisory generalized predictive control (GPC) by combining GPC with statistical process control (SPC) for the control of the thin film deposition process. In the supervised GPC, the deposition process is described as an ARMAX model...
Journal Articles
Control of Thin Film Growth in Chemical Vapor Deposition Manufacturing Systems: A Feasibility Study
Available to Purchase
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2002, 124(3): 715–724.
Published Online: July 11, 2002
... for thin film production. Advantages of computer aided optimization include high design turnaround time, flexibility to explore a larger design space and the development and adaptation of automation techniques for design and optimization. A CVD reactor consisting of a vertical impinging jet at atmospheric...