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Keywords: submicron accuracy
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. February 2013, 135(1): 011002.
Paper No: MANU-12-1065
Published Online: January 7, 2013
... frictionless motion microscale machine tool porous air bearing precision actuator submicron accuracy The design and manufacturing process for a porous-restricted aerostatic lead screw actuator (ALSA) is presented. The ALSA provides near-frictionless motion with submicron positioning accuracy, high...
