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Keywords: single crystal silicon
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Journal Articles
A Material Removal Rate Prediction Model for High-Shear and Low-Pressure Grinding of Single Crystal Silicon
Available to Purchase
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2025, 147(6): 061011.
Paper No: MANU-24-1695
Published Online: March 11, 2025
... of the abrasive grain, D is the diameter of the abrasive tool, and v gt and v fr are the grinding speed and the workpiece feed rate, respectively. The critical EPT depth of single crystal silicon is approximately 3.61 nm, while the critical BDT depth is approximately 11 nm. These values are obtained...
Journal Articles
Bubble Behavior and Its Effect on Surface Integrity in Laser-Induced Plasma Micro-Machining Silicon Wafer
Available to Purchase
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. September 2022, 144(9): 091008.
Paper No: MANU-21-1592
Published Online: May 19, 2022
.... This research contributes to better understanding bubble behavior related to machining performances in LIPMM of single-crystal silicon. A large number of compact bubbles are formed during LIPMM. Whether the bubble fusion or bubble rebound phenomenon occurs depends on the acting molecule, the size...
