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Keywords: light interferometers
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2001, 123(3): 445–452.
Published Online: April 1, 2000
... AND ENGINEERING . Manuscript received Nov. 1999; revised April 2000. Associate Editor: E. C. DeMeter. 01 Nov 1999 01 April 2000 angular measurement light interferometers hard discs actuators position control optical sensors The measurement of nanometer-scale displacements...
Journal Articles
Roy J. Schimmel, Graduate Research Assistant, Jairam Manjunathaiah, Graduate Research Assistant, William J. Endres, Assistant Professor, Mem. ASME
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. August 2000, 122(3): 590–593.
Published Online: October 1, 1999
... Division for publication in the JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING . Manuscript received July 1997; revised Oct. 1999. Associate Technical Editor: S. Kapoor. 01 July 1997 01 Oct 1999 tools light interferometry light interferometers size measurement manufacturing...
