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Keywords: high-shear and low-pressure grinding
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Journal Articles

A Material Removal Rate Prediction Model for High-Shear and Low-Pressure Grinding of Single Crystal Silicon

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Yebing Tian, Shuangchen Zhao, Guoyu Zhang, Pengzhan Wang, Shuang Liu
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2025, 147(6): 061011.
Paper No: MANU-24-1695
https://doi.org/10.1115/1.4068068
Published Online: March 11, 2025
...Yebing Tian; Shuangchen Zhao; Guoyu Zhang; Pengzhan Wang; Shuang Liu A novel abrasive tool, based on the principle of liquid body armor, was developed in a previous study. However, a material removal rate (MRR) model for the high-shear and low-pressure grinding of brittle materials using this tool...
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Topics: Grinding, Pressure, Shear (Mechanics), Crystals, Silicon