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Keywords: frictionless motion
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. February 2013, 135(1): 011002.
Paper No: MANU-12-1065
Published Online: January 7, 2013
..., the ALSA maintained both frictionless motion and stability over a 50 mm length of travel. Using the linear encoder as a feedback device, the ALSA was able to position within 10 nm. This verifies sub-micron positioning accuracy as well as demonstrates that nanometer positioning accuracy may be possible...
