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Keywords: LIGA-like process
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Journal Articles
Article Type: Technical Papers
J. Manuf. Sci. Eng. February 2007, 129(1): 126–134.
Published Online: June 26, 2006
...Yung-Chun Lee; Chun-Ming Chen; Chun-Ying Wu This paper presents an effective and low-cost method for fabricating spherical and aspheric microlenses based on excimer laser LIGA-like processes. It is based on a newly developed excimer laser micromachining technique that can accurately machine a 3D...
