1-20 of 47
Silicon
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Journal Articles

A Material Removal Rate Prediction Model for High-Shear and Low-Pressure Grinding of Single Crystal Silicon

Available to Purchase
Yebing Tian, Shuangchen Zhao, Guoyu Zhang, Pengzhan Wang, Shuang Liu
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2025, 147(6): 061011.
Paper No: MANU-24-1695
https://doi.org/10.1115/1.4068068
Published Online: March 11, 2025
View Articletitled, A Material Removal Rate Prediction Model for High-Shear and Low-Pressure Grinding of Single Crystal Silicon
Open the PDF for A Material Removal Rate Prediction Model for High-Shear and Low-Pressure Grinding of Single Crystal Silicon in another window
Topics: Grinding, Pressure, Shear (Mechanics), Crystals, Silicon
Journal Articles

Hyperspectral Analysis of Silicon Nanowires Manufactured Through Metal-Assisted Chemical Etching

Available to Purchase
Pee-Yew Lee, Guo-Hao Lu, Yi-Hong Bai, Cheng-You Chen, Li-Yan Wu, Chun-Jen Weng, Hung Ji Huang, Yung-Sheng Lin
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. February 2025, 147(2): 024501.
Paper No: MANU-24-1424
https://doi.org/10.1115/1.4066546
Published Online: October 14, 2024
View Articletitled, Hyperspectral Analysis of Silicon Nanowires Manufactured Through Metal-Assisted Chemical Etching
Open the PDF for Hyperspectral Analysis of Silicon Nanowires Manufactured Through Metal-Assisted Chemical Etching in another window
Topics: Chemical etching, Etching, Imaging, Metals, Nanowires, Reflection, Semiconductor wafers, Silicon, Wavelength, Resonance
Journal Articles

Effects of Bubbles on Manufacturing Gold Dendrites and Silicon Nanowires Through the Fluoride-Assisted Galvanic Replacement Reaction

Available to Purchase
Pee-Yew Lee, Hung Ji Huang, Tsung-Shine Ko, Ying-Lun Hung, Li-Yan Wu, Jia-Jun Fan, Yung-Sheng Lin
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. November 2023, 145(11): 114501.
Paper No: MANU-23-1284
https://doi.org/10.1115/1.4062878
Published Online: July 21, 2023
View Articletitled, Effects of Bubbles on Manufacturing Gold Dendrites and Silicon Nanowires Through the Fluoride-Assisted Galvanic Replacement Reaction
Open the PDF for Effects of Bubbles on Manufacturing Gold Dendrites and Silicon Nanowires Through the Fluoride-Assisted Galvanic Replacement Reaction in another window
Topics: Bubbles, Manufacturing, Metals, Nanowires, Silicon, Vacuum, Semiconductor wafers, Chemical etching, Etching
Journal Articles

Bubble Effects on Manufacturing of Silicon Nanowires by Metal-Assisted Chemical Etching

Available to Purchase
Pee-Yew Lee, Chun-Jen Weng, Hung Ji Huang, Li-Yan Wu, Guo-Hao Lu, Chao-Feng Liu, Cheng-You Chen, Ting-Yu Li, Yung-Sheng Lin
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. September 2023, 145(9): 094501.
Paper No: MANU-23-1086
https://doi.org/10.1115/1.4062392
Published Online: May 9, 2023
View Articletitled, Bubble Effects on Manufacturing of Silicon Nanowires by Metal-Assisted Chemical Etching
Open the PDF for Bubble Effects on Manufacturing of Silicon Nanowires by Metal-Assisted Chemical Etching in another window
Topics: Bubbles, Chemical etching, Etching, Hydrogen, Metals, Nanowires, Semiconductor wafers, Manufacturing, Silicon
Journal Articles

Precision Silicon Exfoliation Tool Design

Free
Martin J. Ward, Dipankar Behera, Michael A. Cullinan
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. February 2023, 145(2): 024501.
Paper No: MANU-22-1105
https://doi.org/10.1115/1.4055320
Published Online: September 27, 2022
View Articletitled, Precision Silicon Exfoliation Tool Design
Open the PDF for Precision Silicon Exfoliation Tool Design in another window
Topics: Design, Metrology, Semiconductor wafers, Silicon, Stress, Surface roughness, Errors, Nickel, Film thickness, Engineering prototypes
Journal Articles

Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon

Available to Purchase
Jiqiang Wang, Yanquan Geng, Zihan Li, Yongda Yan, Xichun Luo, Pengfei Fan
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. April 2022, 144(4): 041013.
Paper No: MANU-21-1127
https://doi.org/10.1115/1.4052356
Published Online: October 19, 2021
View Articletitled, Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon
Open the PDF for Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon in another window
Topics: Crystals, Damage, Machining, Nanochannels, Silicon, Vibration, Stress
Journal Articles

Sustainable Fabrication of Glass Nanostructures Using Infrared Transparent Mold Assisted by CO 2 Laser Scanning Irradiation

Available to Purchase
Mohd Zairulnizam Bin Mohd Zawawi, Taekyung Kim, Myungki Jung, Jaehun Im, Shinill Kang
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. December 2018, 140(12): 121005.
Paper No: MANU-18-1268
https://doi.org/10.1115/1.4041181
Published Online: September 21, 2018
View Articletitled, Sustainable Fabrication of Glass Nanostructures Using Infrared Transparent Mold Assisted by CO 2 Laser Scanning Irradiation
Open the PDF for Sustainable Fabrication of Glass Nanostructures Using Infrared Transparent Mold Assisted by CO 2 Laser Scanning Irradiation in another window
Topics: Carbon dioxide lasers, Glass, Silicon, Irradiation (Radiation exposure), Manufacturing, Lasers
Journal Articles

Performance of Diamond and Silicon Carbide Wheels on Grinding of Bioceramic Material Under Minimum Quantity Lubrication Condition

Available to Purchase
P. Suya Prem Anand, N. Arunachalam, L. Vijayaraghavan
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. December 2017, 139(12): 121019.
Paper No: MANU-17-1235
https://doi.org/10.1115/1.4037940
Published Online: November 2, 2017
View Articletitled, Performance of Diamond and Silicon Carbide Wheels on Grinding of Bioceramic Material Under Minimum Quantity Lubrication Condition
Open the PDF for Performance of Diamond and Silicon Carbide Wheels on Grinding of Bioceramic Material Under Minimum Quantity Lubrication Condition in another window
Topics: Diamonds, Grinding, Grinding wheels, Wheels, Silicon, Fluids, Lubrication
Journal Articles

A Molecular Dynamics Simulation Study of Material Removal Mechanisms in Vibration Assisted Nano Impact-Machining by Loose Abrasives

Available to Purchase
Sagil James, Murali Sundaram
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. August 2017, 139(8): 081014.
Paper No: MANU-16-1452
https://doi.org/10.1115/1.4036559
Published Online: May 11, 2017
View Articletitled, A Molecular Dynamics Simulation Study of Material Removal Mechanisms in Vibration Assisted Nano Impact-Machining by Loose Abrasives
Open the PDF for A Molecular Dynamics Simulation Study of Material Removal Mechanisms in Vibration Assisted Nano Impact-Machining by Loose Abrasives in another window
Topics: Abrasives, Borosilicate glasses, Heat resistant glass, Kinetic energy, Machining, Nanoparticles, Nanoscale phenomena, Silicon, Simulation, Vibration
Journal Articles

Residual Stress Distribution in Silicon Wafers Machined by Rotational Grinding

Available to Purchase
Ping Zhou, Ying Yan, Ning Huang, Ziguang Wang, Renke Kang, Dongming Guo
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. August 2017, 139(8): 081012.
Paper No: MANU-16-1608
https://doi.org/10.1115/1.4036125
Published Online: May 10, 2017
View Articletitled, Residual Stress Distribution in Silicon Wafers Machined by Rotational Grinding
Open the PDF for Residual Stress Distribution in Silicon Wafers Machined by Rotational Grinding in another window
Topics: Deformation, Diamonds, Grinding, Semiconductor wafers, Stress, Wheels, Stress concentration, Damage, Silicon
Journal Articles

Tool Load Sensitivity Against Multidimensional Process Influences in Microblanking of Copper Foils With Silicon Punches

Available to Purchase
Sven Hildering, Markus Michalski, Ulf Engel, Marion Merklein
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. September 2016, 138(9): 091004.
Paper No: MANU-15-1570
https://doi.org/10.1115/1.4033522
Published Online: June 20, 2016
View Articletitled, Tool Load Sensitivity Against Multidimensional Process Influences in Microblanking of Copper Foils With Silicon Punches
Open the PDF for Tool Load Sensitivity Against Multidimensional Process Influences in Microblanking of Copper Foils With Silicon Punches in another window
Topics: Copper foil, Cutting, Errors, Finite element model, Silicon, Stress, Tension, Wear, Fracture (Materials), Blanking (Metalworking)
Journal Articles

Deposition of a Silicon Carbide Reinforced Metal Matrix Composite (P25) Layer Using CO 2 Laser

Available to Purchase
Mum Wai Yip, Stuart Barnes, Ahmed Aly Diaa Mohmmed Sarhan
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. June 2015, 137(3): 031010.
Paper No: MANU-14-1349
https://doi.org/10.1115/1.4029831
Published Online: June 1, 2015
View Articletitled, Deposition of a Silicon Carbide Reinforced Metal Matrix Composite (P25) Layer Using CO 2 Laser
Open the PDF for Deposition of a Silicon Carbide Reinforced Metal Matrix Composite (P25) Layer Using CO 2 Laser in another window
Topics: Iron, Lasers, Particulate matter, Porosity, Carbon dioxide lasers, Microhardness, Silicon
Journal Articles

Modeling of Material Removal Rate in Vibration Assisted Nano Impact-Machining by Loose Abrasives

Available to Purchase
Sagil James, Murali M. Sundaram
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. April 2015, 137(2): 021008.
Paper No: MANU-14-1284
https://doi.org/10.1115/1.4028199
Published Online: April 1, 2015
View Articletitled, Modeling of Material Removal Rate in Vibration Assisted Nano Impact-Machining by Loose Abrasives
Open the PDF for Modeling of Material Removal Rate in Vibration Assisted Nano Impact-Machining by Loose Abrasives in another window
Topics: Abrasives, Machining, Modeling, Vibration, Particulate matter, Silicon, Borosilicate glasses, Heat resistant glass, Brittleness, Atomic force microscopy
Journal Articles

A Theoretical Assessment of Surface Defect Machining and Hot Machining of Nanocrystalline Silicon Carbide

Available to Purchase
Saurav Goel, Waleed Bin Rashid, Xichun Luo, Anupam Agrawal, V. K. Jain
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. April 2014, 136(2): 021015.
Paper No: MANU-12-1239
https://doi.org/10.1115/1.4026297
Published Online: February 10, 2014
View Articletitled, A Theoretical Assessment of Surface Defect Machining and Hot Machining of Nanocrystalline Silicon Carbide
Open the PDF for A Theoretical Assessment of Surface Defect Machining and Hot Machining of Nanocrystalline Silicon Carbide in another window
Topics: Cutting, Machining, Molecular dynamics simulation, Silicon, Stress, Cutting tools, Temperature
Journal Articles

Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma

Available to Purchase
X. Zhao, Y. C. Shin
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. December 2013, 135(6): 061015.
Paper No: MANU-13-1193
https://doi.org/10.1115/1.4025805
Published Online: November 18, 2013
View Articletitled, Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma
Open the PDF for Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma in another window
Topics: Ablation (Vaporization technology), Dynamics (Mechanics), Electrons, Lasers, Plasmas (Ionized gases), Silicon, Absorption, Fluence (Radiation measurement), Temperature
Journal Articles

Laser Bending of Silicon Sheet: Absorption Factor and Mechanisms

Available to Purchase
Weixing Xu, L. C. Zhang, Xuyue Wang
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. December 2013, 135(6): 061005.
Paper No: MANU-13-1128
https://doi.org/10.1115/1.4025579
Published Online: November 5, 2013
View Articletitled, Laser Bending of Silicon Sheet: Absorption Factor and Mechanisms
Open the PDF for Laser Bending of Silicon Sheet: Absorption Factor and Mechanisms in another window
Topics: Absorption, Lasers, Silicon, Temperature, Laser beams, Thermocouples, Thin films
Journal Articles

Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics

Available to Purchase
Raul E. Riveros, Hitomi Yamaguchi, Taylor Boggs, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Utako Takagi, Yuichiro Ezoe, Kensuke Ishizu, Teppei Moriyama
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. October 2012, 134(5): 051001.
https://doi.org/10.1115/1.4006967
Published Online: August 20, 2012
View Articletitled, Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics
Open the PDF for Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics in another window
Topics: Annealing, Finishing, Hydrogen, Microelectromechanical systems, Mirrors, Optics, Silicon, Surface roughness, X-ray optics, X-rays
Journal Articles

Femtosecond Laser-Induced Simultaneous Surface Texturing and Crystallization of a-Si:H Thin Film: Absorption and Crystallinity

Available to Purchase
Hongliang Wang, Panjawat Kongsuwan, Gen Satoh, Y. Lawrence Yao
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2012, 134(3): 031006.
https://doi.org/10.1115/1.4006548
Published Online: May 7, 2012
View Articletitled, Femtosecond Laser-Induced Simultaneous Surface Texturing and Crystallization of a-Si:H Thin Film: Absorption and Crystallinity
Open the PDF for Femtosecond Laser-Induced Simultaneous Surface Texturing and Crystallization of a-Si:H Thin Film: Absorption and Crystallinity in another window
Topics: Absorption, Crystallization, Lasers, Water, Spectra (Spectroscopy), Thin films, Silicon
Journal Articles

Time-Resolved Experimental Study of Silicon Carbide Ablation by Infrared Nanosecond Laser Pulses

Available to Purchase
Yibo Gao, Yun Zhou, Benxin Wu, Sha Tao, Ronald L. Jacobsen, Bill Goodman
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. April 2011, 133(2): 021006.
https://doi.org/10.1115/1.4003618
Published Online: March 11, 2011
View Articletitled, Time-Resolved Experimental Study of Silicon Carbide Ablation by Infrared Nanosecond Laser Pulses
Open the PDF for Time-Resolved Experimental Study of Silicon Carbide Ablation by Infrared Nanosecond Laser Pulses in another window
Topics: Ablation (Vaporization technology), Laser ablation, Lasers, Silicon, Plasmas (Ionized gases), Micromachining
Journal Articles

Integrated Two-Photon Polymerization With Nanoimprinting for Direct Digital Nanomanufacturing

Available to Purchase
Wande Zhang, Li-Hsin Han, Shaochen Chen
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030907.
https://doi.org/10.1115/1.4001661
Published Online: May 26, 2010
View Articletitled, Integrated Two-Photon Polymerization With Nanoimprinting for Direct Digital Nanomanufacturing
Open the PDF for Integrated Two-Photon Polymerization With Nanoimprinting for Direct Digital Nanomanufacturing in another window
Topics: Glass, Lasers, Manufacturing, Nanomanufacturing, Photons, Polymerization, Polymers, Nanostructures , Silicon, Wavelength