1-7 of 7
Interferometers
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Journal Articles

Three-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies

Available to Purchase
Fengfeng Zhou, Xingyu Fu, Siying Chen, Changheon Han, Martin B. G. Jun
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070907.
Paper No: MANU-23-1611
https://doi.org/10.1115/1.4065523
Published Online: June 3, 2024
View Articletitled, Three-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies
Open the PDF for Three-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies in another window
Topics: Fibers, Flaw detection, Interferometers, Semiconductor wafers, Leakage, Optical fiber, Refractive index, Wavelength
Journal Articles

Machine Straightness Error Measurement Based on Optical Fiber Fabry–Pérot Interferometer Monitoring Technique

Free
Xingyu Fu, Fengfeng Zhou, Huitaek Yun, Eunseob Kim, Siying Chen, Martin Byung-Guk Jun
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. January 2023, 145(1): 011007.
Paper No: MANU-22-1325
https://doi.org/10.1115/1.4055897
Published Online: October 18, 2022
View Articletitled, Machine Straightness Error Measurement Based on Optical Fiber Fabry–Pérot Interferometer Monitoring Technique
Open the PDF for Machine Straightness Error Measurement Based on Optical Fiber Fabry–Pérot Interferometer Monitoring Technique in another window
Topics: Errors, Interferometers, Machinery, Optical fiber, Sensors, Fibers
Journal Articles

Scanning Grating Microinterferometer for MEMS Metrology

Available to Purchase
Byungki Kim, Graduate Research Assistant, Michael C. Schmittdiel, Graduate Research Assistant, F. Levent Degertekin, Assistant Professor, Thomas R. Kurfess, Professor
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2004, 126(4): 807–812.
https://doi.org/10.1115/1.1812773
Published Online: February 4, 2005
View Articletitled, Scanning Grating Microinterferometer for MEMS Metrology
Open the PDF for Scanning Grating Microinterferometer for MEMS Metrology in another window
Topics: Diffraction gratings, Interferometers, Manufacturing, Metrology, Microelectromechanical systems, Vibration, Resolution (Optics), Sensors
Journal Articles

Development of a Grating Interferometer with Application to HDD Servo-Track Writing

Available to Purchase
Harry D. Garner, Kok-Meng Lee, Lin Guo
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2001, 123(3): 445–452.
https://doi.org/10.1115/1.1360694
Published Online: April 1, 2000
View Articletitled, Development of a Grating Interferometer with Application to HDD Servo-Track Writing
Open the PDF for Development of a Grating Interferometer with Application to HDD Servo-Track Writing in another window
Topics: Diffraction gratings, Diffraction patterns, Horizontal directional drilling, Interferometers, Displacement, Actuators, Sensors, Design
Journal Articles

A Fiber Optic Sensor for Surface Roughness Measurement

Available to Purchase
C. Bradley, J. Bohlmann, S. Kurada
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. May 1998, 120(2): 359–367.
https://doi.org/10.1115/1.2830135
Published Online: May 1, 1998
View Articletitled, A Fiber Optic Sensor for Surface Roughness Measurement
Open the PDF for A Fiber Optic Sensor for Surface Roughness Measurement in another window
Topics: Cavities, Data acquisition systems, Fiber optic sensors, Fibers, Interferometers, Lenses (Optics), Phase transitions, Signals, Surface roughness
Journal Articles

Assessment of Tool Wear in Milling Using Acoustic Emission Detected by a Fiber-Optic Interferometer

Available to Purchase
T. A. Carolan, D. P. Hand, J. S. Barton, J. D. C. Jones, P. Wilkinson, R. L. Reuben
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. August 1996, 118(3): 428–433.
https://doi.org/10.1115/1.2831048
Published Online: August 1, 1996
View Articletitled, Assessment of Tool Wear in Milling Using Acoustic Emission Detected by a Fiber-Optic Interferometer
Open the PDF for Assessment of Tool Wear in Milling Using Acoustic Emission Detected by a Fiber-Optic Interferometer in another window
Topics: Acoustic emissions, Fibers, Interferometers, Milling, Wear, Calibration, Cutting tools, Displacement, Frequency response, Piezoelectric transducers
Journal Articles

A Stochastic Approach to the Measurement and Analysis of Leadscrew Drive Kinematic Errors

Available to Purchase
Hong Zan Bin, K. Yamazaki, M. F. DeVries
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. November 1984, 106(4): 339–344.
https://doi.org/10.1115/1.3185956
Published Online: November 1, 1984
View Articletitled, A Stochastic Approach to the Measurement and Analysis of Leadscrew Drive Kinematic Errors
Open the PDF for A Stochastic Approach to the Measurement and Analysis of Leadscrew Drive Kinematic Errors in another window
Topics: Errors, Kinematics, Machine tools, Calibration, Computers, Displacement, Emission spectroscopy, Interferometers, Lasers, Position control