Free abrasive diamond wire saw machining is often used to cut hard and brittle materials, especially for wafers in the semiconductor and optoelectronics industries. Wire saws, both free and fixed abrasive, have excellent flexibility, as compared to inner circular saws, outer saws, and ribbon saws, as they produce a narrower kerf, lower cutting forces, and less material waste. However, fixed abrasive wire saw machining is being considered more and more due to its potential for increased productivity and the fact that it is more environmentally friendly as it does not use special coolants that must be carefully disposed. The cutting forces generated during the wire saw process strongly affect the quality of the produced parts. However, the relationship between these forces and the process parameters has only been explored qualitatively. Based on analyzing the forces generated from the chip formation and friction of a single abrasive, this study derives an analytical cutting force model for the wire saw machining process. The analytical model explains qualitative observations seen in the literature describing the relationship between the cutting forces and the wafer feed rate, wire velocity, and contact length between the wire and wafer. Extensive experimental work is conducted to validate the analytical force model. Silicon carbide (SiC) monocrystal, which is employed extensively in the fields of microelectronics and optoelectronics and is known to be particularly challenging to process due to its extremely high hardness and brittleness, is used as the material in these experimental studies. The results show that the analytical force model can predict the cutting forces when wire saw machining SiC monocrystal wafers with average errors between the experimental and predicted normal and tangential forces of 9.98% and 12.1%, respectively.
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April 2017
Research-Article
Analytical Force Modeling of Fixed Abrasive Diamond Wire Saw Machining With Application to SiC Monocrystal Wafer Processing
Shujuan Li,
Shujuan Li
School of Mechanical and
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: shujuanli@xaut.edu.cn
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: shujuanli@xaut.edu.cn
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Aofei Tang,
Aofei Tang
School of Mechanical and
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: aofeitang@126.com
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: aofeitang@126.com
Search for other works by this author on:
Yong Liu,
Yong Liu
School of Mechanical and
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: yongliu@xaut.edu.cn
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: yongliu@xaut.edu.cn
Search for other works by this author on:
Jiabin Wang,
Jiabin Wang
School of Mechanical and
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: wang_ticktack@outlook.com
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: wang_ticktack@outlook.com
Search for other works by this author on:
Dan Cui,
Dan Cui
School of Mechanical and
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: dancui@163.com
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: dancui@163.com
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Robert G. Landers
Robert G. Landers
Department of Mechanical and
Aerospace Engineering,
Missouri University of
Science and Technology,
Rolla, MO 65409–0050
e-mail: landersr@mst.edu
Aerospace Engineering,
Missouri University of
Science and Technology,
Rolla, MO 65409–0050
e-mail: landersr@mst.edu
Search for other works by this author on:
Shujuan Li
School of Mechanical and
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: shujuanli@xaut.edu.cn
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: shujuanli@xaut.edu.cn
Aofei Tang
School of Mechanical and
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: aofeitang@126.com
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: aofeitang@126.com
Yong Liu
School of Mechanical and
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: yongliu@xaut.edu.cn
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: yongliu@xaut.edu.cn
Jiabin Wang
School of Mechanical and
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: wang_ticktack@outlook.com
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: wang_ticktack@outlook.com
Dan Cui
School of Mechanical and
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: dancui@163.com
Instrument Engineering,
Xi'an University of Technology,
5 South Jinhua Road,
Xi'an 710048, Shaanxi, China
e-mail: dancui@163.com
Robert G. Landers
Department of Mechanical and
Aerospace Engineering,
Missouri University of
Science and Technology,
Rolla, MO 65409–0050
e-mail: landersr@mst.edu
Aerospace Engineering,
Missouri University of
Science and Technology,
Rolla, MO 65409–0050
e-mail: landersr@mst.edu
Manuscript received April 28, 2016; final manuscript received September 5, 2016; published online October 18, 2016. Assoc. Editor: Z. J. Pei.
J. Manuf. Sci. Eng. Apr 2017, 139(4): 041003 (11 pages)
Published Online: October 18, 2016
Article history
Received:
April 28, 2016
Revised:
September 5, 2016
Citation
Li, S., Tang, A., Liu, Y., Wang, J., Cui, D., and Landers, R. G. (October 18, 2016). "Analytical Force Modeling of Fixed Abrasive Diamond Wire Saw Machining With Application to SiC Monocrystal Wafer Processing." ASME. J. Manuf. Sci. Eng. April 2017; 139(4): 041003. https://doi.org/10.1115/1.4034792
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