Shaping Silicon Nitride With a Carbon Dioxide Laser by Overlapping Multiple Grooves Available to Purchase

In this research, the feasibility of shaping Si₃N₄ by overlapping multiple grooves produced with a continuously operated CO₂ laser beam is demonstrated. The relationships of process parameters such as material removal rate and arithmetic average surface roughness to machine parameters such as feed and speed have been investigated. Strategies for laser shaping are discussed and an economic evaluation of laser shaping is presented.