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Keywords: sputter etching
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. May 2009, 131(5): 051401.
Published Online: March 20, 2009
... 03 2009 forced convection heat exchangers lithography microchannel flow micromechanical devices silicon sputter etching microchannel cooler constructal theory fractal geometry constructal trees electronic cooling single phase forced convection GaN SiC In recent...