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Keywords: microactuators
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. December 2008, 130(12): 122401.
Published Online: September 16, 2008
... microactuators temperature measurement thermometers Raman spectroscopy thermometry MEMS thermal actuators Temperature diagnostics are essential tools for the evaluation and design of microelectronics devices and microelectromechanical systems (MEMSs). The length scale of these devices...
Journal Articles
Publisher: ASME
Article Type: Article
J. Heat Mass Transfer. January 2005, 127(1): 34–37.
Published Online: February 15, 2005
... actuator is shown in Fig. 1 with corresponding dimensional details in Table 1 and material property data in Table 2 . 2 Schematic of the thermal actuator before and after actuation 1 Design of the thermal actuator Thermal microactuators are compact and can provide high...