... and heat transfer in micro-electromechanical system (MEMS) devices. e-mail:  dai_lf@sjtu.edu.cn 1 Corresponding author. e-mail:  whysrj@sjtu.edu.cn 03 10 2021 22 03 2022 27 04 2022 gas flow around square cylinder transition flow regime rarefaction effect heat transfer...

... to conjugate heat transfer effect, is observed even for a small value of solid conductivity, the performances in terms of heat sink efficiency are essentially a function only of the Mach number. MEMS rarefied gas dynamics conjugate heat transfer compressibility Obvious manufacturing...

... Knudsen and Mach numbers. roughness MEMS rarefied gas dynamics hybrid method kinetic equation In MEMS fabrication due to the small scale, it is nearly impossible to create an actual smooth surface. On the other hand, surface roughness may have a significant impact on microchannel...

... axial conduction cryogenic MEMS Schematic of a single plate The model is developed in dimensionless form in order to maximize its utility and modularity. The dimensionless temperatures of the hot fluid ( θ h ) , cold fluid ( θ c ) , and wall ( θ...

...Leslie M. Phinney; Justin R. Serrano; Edward S. Piekos; John R. Torczynski; Michael A. Gallis; Allen D. Gorby This paper reports on experimental and computational investigations into the thermal performance of microelectromechanical systems (MEMS) as a function of the pressure of the surrounding...

... individual sensor. Experiment setup The setup, as shown in Fig. 2 , consists of three primary subsystems: the flow loop section, instrumentation, and a data acquisition system. The test section houses the MEMS microchannel devices and its fluidic and thermal packaging module. The microchannel...

.... The cold-side temperature began at room temperature and reached a steady state temperature of approximately 50 ° C before the apparent thermal conductivity was determined. To further assess the ability of the proposed micro-insulation to provide adequate performance in a MEMS...

... measurements on electrically powered MEMS actuators powered with a periodic signal. Furthermore, we demonstrate a way of obtaining reliable temperature measurements on micron-scale devices that undergo mechanical movement during the device operation. 13 08 2007 10 06 2008 16 09 2008...

... micromechanical devices nucleate boiling bubble behavior MEMS artificial cavity Since boiling heat transfer has a high heat transfer coefficient, it has been used as a cooling technique for high-temperature bodies. The boiling phenomena have been investigated for more than 60 – 70 years...

... derived (Appendix) and solved a predictive mathematical model for the rates of water vapor mass transfer m ̇ av from the apparatus of Fig. 1 , 5 m ̇ av = ∫ r o r = 0 2 π r R BL , downstream + R mem { ∫ r o r = 0 1 δ ( r...

... to practically utilize thermally expandable flexible thin films, especially in MEMS and electronic cooling applications. 15 03 2006 02 10 2006 microchannel flow film flow heat transfer temperature distribution thermal expansion elastic constants numerical analysis thin films heat...

... 10 07 2006 microchannel flow heat sinks mass transfer flow visualisation forced convection two-phase flow boiling critical heat flux boiling microchannels flow pattern MEMS Forced convection boiling in microchannels is recognized as an enabling heat transfer mode...

... silicon elemental semiconductors micromechanical devices coherent antiStokes Raman scattering spectral line breadth thermal stresses calibration spectral methods of temperature measurement stress effects Raman spectroscopy MEMS thermometry thermal stresses Recent developments...

... laminar flow thermal resistance friction pipe flow boundary layers flow separation MEMS heat sink pin fin cross flow friction factor microchannel In pursuit of cooling solutions for the ever-increasing demand for integrated circuit (IC) power density, micro scale...