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Journal Articles

Experimental Study of the Effect of Precursor Composition on the Microstructure of Gallium Nitride Thin Films Grown by the MOCVD Process

Omar Dhannoon Jumaah, Yogesh Jaluria

Publisher: ASME

J. Heat Mass Transfer. October 2021, 143(10): 102201.

Paper No: HT-21-1107

https://doi.org/10.1115/1.4051672

Published Online: September 8, 2021

View Articletitled, Experimental Study of the Effect of Precursor Composition on the Microstructure of Gallium Nitride Thin Films Grown by the MOCVD Process

Topics: Gallium nitride, Metalorganic chemical vapor deposition, Thin films, Flow (Dynamics), Sapphire, Semiconductor wafers

Journal Articles

The Effect of Carrier Gas and Reactor Pressure on Gallium Nitride Growth in MOCVD Manufacturing Process

Omar Jumaah, Yogesh Jaluria

Publisher: ASME

J. Heat Mass Transfer. August 2019, 141(8): 082101.

Paper No: HT-18-1529

https://doi.org/10.1115/1.4043895

Published Online: June 12, 2019

View Articletitled, The Effect of Carrier Gas and Reactor Pressure on Gallium Nitride Growth in MOCVD Manufacturing Process

Topics: Flow (Dynamics), Gallium nitride, Manufacturing, Metalorganic chemical vapor deposition, Pressure, Thin films, Semiconductor wafers, Computer simulation

Journal Articles

Development of a Device for the Nondestructive Thermal Diffusivity Determination of Combustion Chamber Deposits and Thin Coatings

Mark A. Hoffman, Benjamin J. Lawler, Zoran S. Filipi, Orgun A. Güralp, Paul M. Najt

Publisher: ASME

J. Heat Mass Transfer. July 2014, 136(7): 071601.

Paper No: HT-13-1204

https://doi.org/10.1115/1.4026908

Published Online: March 17, 2014

View Articletitled, Development of a Device for the Nondestructive Thermal Diffusivity Determination of Combustion Chamber Deposits and Thin Coatings

Topics: Combustion chambers, Heat flux, Probes, Radiation (Physics), Semiconductor wafers, Temperature, Thermal diffusivity, Homogeneous charge compression ignition engines, Coatings, Graphite

Journal Articles

Design and Evaluation of a MEMS-Based Stirling Microcooler

Dongzhi Guo, Jinsheng Gao, Alan J. H. McGaughey, Gary K. Fedder, Matthew Moran, Shi-Chune Yao

Publisher: ASME

J. Heat Mass Transfer. November 2013, 135(11): 111003.

Paper No: HT-12-1144

https://doi.org/10.1115/1.4024596

Published Online: September 23, 2013

View Articletitled, Design and Evaluation of a MEMS-Based Stirling Microcooler

Topics: Cooling, Cycles, Design, Heat, Heat transfer, Microcoolers, Microelectromechanical systems, Porosity, Silicon, Temperature

Journal Articles

Fabrication and Experimental Characterization of Nanochannels

Vinh-Nguyen Phan, Nam-Trung Nguyen, Chun Yang, Pierre Joseph, Anne-Marie Gué

Publisher: ASME

J. Heat Mass Transfer. May 2012, 134(5): 051012.

https://doi.org/10.1115/1.4005702

Published Online: April 13, 2012

View Articletitled, Fabrication and Experimental Characterization of Nanochannels

Topics: Drying, Glass, Manufacturing, Nanofluidics, Reactive-ion etching, Silicon, Microchannels, Semiconductor wafers, Etching, Experimental characterization

Journal Articles

Infrared Radiative Properties of Heavily Doped Silicon at Room Temperature

S. Basu, B. J. Lee, Z. M. Zhang

Publisher: ASME

J. Heat Mass Transfer. February 2010, 132(2): 023301.

https://doi.org/10.1115/1.4000171

Published Online: November 30, 2009

View Articletitled, Infrared Radiative Properties of Heavily Doped Silicon at Room Temperature

Topics: Boron, Electron mobility, Ionization, Modeling, Reflectance, Silicon, Temperature, Thin films, Annealing, Wavelength

Journal Articles

Experimental and Numerical Study of Single Bubble Dynamics on a Hydrophobic Surface

Youngsuk Nam, Jinfeng Wu, Gopinath Warrier, Y. Sungtaek Ju

Publisher: ASME

J. Heat Mass Transfer. December 2009, 131(12): 121004.

https://doi.org/10.1115/1.3216038

Published Online: October 15, 2009

View Articletitled, Experimental and Numerical Study of Single Bubble Dynamics on a Hydrophobic Surface

Topics: Bubbles, Dynamics (Mechanics), Semiconductor wafers

Journal Articles

Subcooled Pool Boiling Experiments on Horizontal Heaters Coated With Carbon Nanotubes

V. Sathyamurthi, H-S. Ahn, D. Banerjee, S. C. Lau

Publisher: ASME

J. Heat Mass Transfer. July 2009, 131(7): 071501.

https://doi.org/10.1115/1.3000595

Published Online: April 30, 2009

View Articletitled, Subcooled Pool Boiling Experiments on Horizontal Heaters Coated With Carbon Nanotubes

Topics: Film boiling, Heat flux, Multi-walled carbon nanotubes, Pool boiling, Silicon, Subcooling, Critical heat flux, Boiling, Semiconductor wafers, Heat transfer

Journal Articles

Microscale Temperature Measurements Near the Triple Line of an Evaporating Thin Liquid Film

Hemanth K. Dhavaleswarapu, Suresh V. Garimella, Jayathi Y. Murthy

Publisher: ASME

J. Heat Mass Transfer. June 2009, 131(6): 061501.

https://doi.org/10.1115/1.3090525

Published Online: April 2, 2009

View Articletitled, Microscale Temperature Measurements Near the Triple Line of an Evaporating Thin Liquid Film

Topics: Evaporation, Temperature, Heat flux, Temperature measurement, Heat transfer, Microscale devices, Semiconductor wafers, Thin films, Heptane

Journal Articles

Radiative Properties of Patterned Wafers With Nanoscale Linewidth

Y.-B. Chen, Z. M. Zhang, P. J. Timans

Publisher: ASME

J. Heat Mass Transfer. January 2007, 129(1): 79–90.

https://doi.org/10.1115/1.2401201

Published Online: June 8, 2006

View Articletitled, Radiative Properties of Patterned Wafers With Nanoscale Linewidth

Topics: Diffraction gratings, Nanoscale phenomena, Radiation (Physics), Semiconductor wafers, Temperature, Wavelength, Waves, Diffraction, Polarization (Electricity), Polarization (Light)

Journal Articles

Pool Boiling Experiments on Multiwalled Carbon Nanotube (MWCNT) Forests

Hee Seok Ahn, Nipun Sinha, Mei Zhang, Debjyoti Banerjee, Shaoli Fang, Ray H. Baughman

Publisher: ASME

J. Heat Mass Transfer. December 2006, 128(12): 1335–1342.

https://doi.org/10.1115/1.2349511

Published Online: May 29, 2006

View Articletitled, Pool Boiling Experiments on Multiwalled Carbon Nanotube (MWCNT) Forests

Topics: Heat flux, Multi-walled carbon nanotubes, Pool boiling, Semiconductor wafers, Silicon, Critical heat flux, Boiling, Film boiling

Journal Articles

Investigation of Lightpipe Volumetric Radiation Effects in RTP Thermometry

David J. Frankman, Brent W. Webb, Matthew R. Jones

Publisher: ASME

J. Heat Mass Transfer. February 2006, 128(2): 132–141.

https://doi.org/10.1115/1.2136917

Published Online: July 28, 2005

View Articletitled, Investigation of Lightpipe Volumetric Radiation Effects in RTP Thermometry

Topics: Absorption, Heat conduction, Radiation (Physics), Radiative heat transfer, Semiconductor wafers, Separation (Technology), Temperature, Temperature distribution, Temperature measurement, Temperature profiles

Journal Articles

Numerical Study of Mixed Convection Flow in an Impinging Jet CVD Reactor for Atmospheric Pressure Deposition of Thin Films

S. P. Vanka, Gang Luo, Nick G. Glumac

Publisher: ASME

J. Heat Mass Transfer. October 2004, 126(5): 764–775.

https://doi.org/10.1115/1.1795232

Published Online: November 16, 2004

View Articletitled, Numerical Study of Mixed Convection Flow in an Impinging Jet CVD Reactor for Atmospheric Pressure Deposition of Thin Films

Topics: Chemical vapor deposition, Flow (Dynamics), Rotation, Temperature, Pressure, Stagnation flow, Thin films, Mixed convection, Semiconductor wafers

Journal Articles

Radiative Properties of Semitransparent Silicon Wafers With Rough Surfaces

Y. H. Zhou, Z. M. Zhang

Publisher: ASME

J. Heat Mass Transfer. June 2003, 125(3): 462–470.

https://doi.org/10.1115/1.1565089

Published Online: May 20, 2003

View Articletitled, Radiative Properties of Semitransparent Silicon Wafers With Rough Surfaces

Topics: Reflectance, Semiconductor wafers, Surface roughness, Radiation (Physics), Silicon, Absorption, Reflection, Temperature, Wavelength

Journal Articles

Flow Visualizations and Transient Temperature Measurements in an Axisymmetric Impinging Jet Rapid Thermal Chemical Vapor Deposition Reactor

A. G. Mathews, J. E. Peterson

Publisher: ASME

J. Heat Mass Transfer. June 2002, 124(3): 564–570.

https://doi.org/10.1115/1.1469525

Published Online: May 10, 2002

View Articletitled, Flow Visualizations and Transient Temperature Measurements in an Axisymmetric Impinging Jet Rapid Thermal Chemical Vapor Deposition Reactor

Topics: Buoyancy, Chemical vapor deposition, Flow (Dynamics), Flow visualization, High temperature, Light scattering, Momentum, Temperature, Temperature measurement, Transients (Dynamics)

Journal Articles

Photo-Acoustic Measurement of Thermal Conductivity of Thin Films and Bulk Materials

Xinwei Wang, Hanping Hu, Xianfan Xu

Publisher: ASME

J. Heat Mass Transfer. February 2001, 123(1): 138–144.

https://doi.org/10.1115/1.1337652

Published Online: June 25, 2000

View Articletitled, Photo-Acoustic Measurement of Thermal Conductivity of Thin Films and Bulk Materials

Topics: Bulk solids, Fittings, Nickel, Phase shift, Thermal barrier coatings, Thermal conductivity, Thermal conductivity measurement, Thin films, Signals, Surface roughness

Journal Articles

Optical Measurement of Thermal Contact Conductance Between Wafer-Like Thin Solid Samples

Y. Ohsone, G. Wu, J. Dryden, F. Zok, A. Majumdar

Publisher: ASME

J. Heat Mass Transfer. November 1999, 121(4): 954–963.

https://doi.org/10.1115/1.2826086

Published Online: November 1, 1999

View Articletitled, Optical Measurement of Thermal Contact Conductance Between Wafer-Like Thin Solid Samples

Topics: Contact resistance, Optical measurement, Semiconductor wafers

Journal Articles

Rayleigh Light Scattering Measurements of Transient Gas Temperature in a Rapid Chemical Vapor Deposition Reactor

J. F. Horton, J. E. Peterson

Publisher: ASME

J. Heat Mass Transfer. February 2000, 122(1): 165–170.

https://doi.org/10.1115/1.521447

Published Online: September 7, 1999

View Articletitled, Rayleigh Light Scattering Measurements of Transient Gas Temperature in a Rapid Chemical Vapor Deposition Reactor

Topics: Chemical vapor deposition, Flow (Dynamics), Flow visualization, Light scattering, Mixed convection, Semiconductor wafers, Temperature, Temperature measurement, Transients (Dynamics), Lasers

Journal Articles

Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates

M. Asheghi, M. N. Touzelbaev, K. E. Goodson, Y. K. Leung, S. S. Wong

Publisher: ASME

J. Heat Mass Transfer. February 1998, 120(1): 30–36.

https://doi.org/10.1115/1.2830059

Published Online: February 1, 1998

View Articletitled, Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates

Topics: Crystals, Heat conduction, Silicon, Silicon-on-insulator, Temperature, Thermal conductivity, Phonons, Semiconductor wafers, Transistors, Cantilevers

Journal Articles

Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement

X. Xu, C. P. Grigoropoulos, R. E. Russo

Publisher: ASME

J. Heat Mass Transfer. February 1995, 117(1): 17–24.

https://doi.org/10.1115/1.2822301

Published Online: February 1, 1995

View Articletitled, Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement

Topics: Excimer lasers, Heating, Lasers, Polysilicon, Reflectance, Temperature, Transients (Dynamics), Chemical vapor deposition, Heat transfer, Manufacturing

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Experimental Study of the Effect of Precursor Composition on the Microstructure of Gallium Nitride Thin Films Grown by the MOCVD Process

The Effect of Carrier Gas and Reactor Pressure on Gallium Nitride Growth in MOCVD Manufacturing Process

Development of a Device for the Nondestructive Thermal Diffusivity Determination of Combustion Chamber Deposits and Thin Coatings

Design and Evaluation of a MEMS-Based Stirling Microcooler

Fabrication and Experimental Characterization of Nanochannels

Infrared Radiative Properties of Heavily Doped Silicon at Room Temperature

Experimental and Numerical Study of Single Bubble Dynamics on a Hydrophobic Surface

Subcooled Pool Boiling Experiments on Horizontal Heaters Coated With Carbon Nanotubes

Microscale Temperature Measurements Near the Triple Line of an Evaporating Thin Liquid Film

Radiative Properties of Patterned Wafers With Nanoscale Linewidth

Pool Boiling Experiments on Multiwalled Carbon Nanotube (MWCNT) Forests

Investigation of Lightpipe Volumetric Radiation Effects in RTP Thermometry

Numerical Study of Mixed Convection Flow in an Impinging Jet CVD Reactor for Atmospheric Pressure Deposition of Thin Films

Radiative Properties of Semitransparent Silicon Wafers With Rough Surfaces

Flow Visualizations and Transient Temperature Measurements in an Axisymmetric Impinging Jet Rapid Thermal Chemical Vapor Deposition Reactor

Photo-Acoustic Measurement of Thermal Conductivity of Thin Films and Bulk Materials

Optical Measurement of Thermal Contact Conductance Between Wafer-Like Thin Solid Samples

Rayleigh Light Scattering Measurements of Transient Gas Temperature in a Rapid Chemical Vapor Deposition Reactor

Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates

Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement

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