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Keywords: vapour deposition
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Journal Articles
Article Type: Technical Papers
J. Fluids Eng. October 2007, 129(10): 1339–1345.
Published Online: May 22, 2007
... on the Pirani principle have been developed and integrated into the pump for monitoring. 23 08 2006 22 05 2007 design engineering etching jets micromachining micromechanical devices vacuum pumps vapour deposition Micropumps are an essential component of many microsystems...