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Keywords: micromechanical devices
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Journal Articles
Article Type: Research Papers
J. Fluids Eng. October 2010, 132(10): 101102.
Published Online: October 20, 2010
... of disk rotational speed, comparisons with theoretical predictions, and one earlier prototype whose performance is significantly less than that of prototype 2. 16 05 2009 03 08 2010 20 10 2010 20 10 2010 air confined flow cooling micromechanical devices rotational flow...
Journal Articles
Article Type: Technical Papers
J. Fluids Eng. October 2007, 129(10): 1339–1345.
Published Online: May 22, 2007
... on the Pirani principle have been developed and integrated into the pump for monitoring. 23 08 2006 22 05 2007 design engineering etching jets micromachining micromechanical devices vacuum pumps vapour deposition Micropumps are an essential component of many microsystems...
Journal Articles
Article Type: Additional Technical Papers
J. Fluids Eng. June 2002, 124(2): 384–392.
Published Online: May 28, 2002
... 2002 micropumps micromechanical devices microfluidics reviews Microelectromechanical systems (MEMS) have enabled a wide range of sensors and actuators to be realized by allowing nonelectrical devices onto microchips. In the early years of MEMS-development, fluidic components were...
Topics: Pumps, Micropumps