Gas flows in plasma etching reactors for semiconductor fabrication became a chief consideration in designing second-generation reactors with higher etching rates. An axisymmetrical model based on the direct simulation Monte Carlo method has been developed for analyzing rarefied gas flows in a vacuum chamber with the conditions of downstream pressure and gas flow rate. By using this simulator, rarefied gas flows with radicals and etch-products were calculated for microwave-plasma etching reactors. The results showed that the flow patterns in the plasma chamber strongly depend on the Knudsen number and the gas-supply structure. The ventilation of the etch-products in the plasma chamber was found to be improved both for higher Knudsen numbers and for gas-supply structures of the downward-flow type, as compared with those of the radial-flow or upward-flow types.
Skip Nav Destination
Article navigation
June 2002
Additional Technical Papers
Direct Simulation Monte Carlo Analysis of Rarefied Gas Flow Structures and Ventilation of Etching Gas in Magneto-Microwave Plasma Etching Reactors
Masato Ikegawa,
Masato Ikegawa
Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan
Search for other works by this author on:
Yoshihumi Ogawa,
Yoshihumi Ogawa
Power and Industrial Systems Kasado, Administrative Division, Hitachi, Ltd., 794 Higashitoyoi, Kudamatsu, Yamaguchi 744-8601, Japan
Search for other works by this author on:
Ryoji Fukuyama,
Ryoji Fukuyama
Power and Industrial Systems Kasado, Administrative Division, Hitachi, Ltd., 794 Higashitoyoi, Kudamatsu, Yamaguchi 744-8601, Japan
Search for other works by this author on:
Tatehito Usui,
Tatehito Usui
Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan
Search for other works by this author on:
Jun’ichi Tanaka
Jun’ichi Tanaka
Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan
Search for other works by this author on:
Masato Ikegawa
Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan
Yoshihumi Ogawa
Power and Industrial Systems Kasado, Administrative Division, Hitachi, Ltd., 794 Higashitoyoi, Kudamatsu, Yamaguchi 744-8601, Japan
Ryoji Fukuyama
Power and Industrial Systems Kasado, Administrative Division, Hitachi, Ltd., 794 Higashitoyoi, Kudamatsu, Yamaguchi 744-8601, Japan
Tatehito Usui
Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan
Jun’ichi Tanaka
Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan
Contributed by the Fluids Engineering Division for publication in the JOURNAL OF FLUIDS ENGINEERING. Manuscript received by the Fluids Engineering Division March 14, 2001; revised manuscript received November 27, 2001. Associate Editor: Y. Matsumoto.
J. Fluids Eng. Jun 2002, 124(2): 476-482 (7 pages)
Published Online: May 28, 2002
Article history
Received:
March 14, 2001
Revised:
November 27, 2001
Online:
May 28, 2002
Citation
Ikegawa, M., Ogawa , Y., Fukuyama, R., Usui , T., and Tanaka, J. (May 28, 2002). "Direct Simulation Monte Carlo Analysis of Rarefied Gas Flow Structures and Ventilation of Etching Gas in Magneto-Microwave Plasma Etching Reactors ." ASME. J. Fluids Eng. June 2002; 124(2): 476–482. https://doi.org/10.1115/1.1459074
Download citation file:
Get Email Alerts
Cited By
Related Articles
DSMC Analysis of Rarefied Gas Flow Over a Rectangular Cylinder at All Knudsen Numbers
J. Fluids Eng (December,2000)
Direct Simulation Monte Carlo Method for the Simulation of Rarefied Gas Flow in Discrete Track Recording Head/Disk Interfaces
J. Tribol (January,2009)
Study on the Deposition Profile Characteristics in the Micron-Scale Trench Using Direct Simulation Monte Carlo Method
J. Fluids Eng (June,1998)
Aerobreakup in Rarefied Supersonic Gas Flows
J. Fluids Eng (July,2004)
Related Proceedings Papers
Related Chapters
Pulsating Supercavities: Occurrence and Behavior
Proceedings of the 10th International Symposium on Cavitation (CAV2018)
Experimental Investigation of Ventilated Supercavitation Under Unsteady Conditions
Proceedings of the 10th International Symposium on Cavitation (CAV2018)
Microwave Imaging Simulation of Ocean Mesoscale Eddy
International Conference on Computer Technology and Development, 3rd (ICCTD 2011)