... and precisely position an additional payload of 2 kg . Its potential applications include semiconductor manufacturing, microfabrication and assembly, nanoscale profiling, and nanoindentation. actuators assembling capacitive sensors light interferometers magnetic levitation nanotechnology permanent...

...Yusuke Kawato; Won-jong Kim This paper presents a novel precision position-sensing methodology using two-axis Hall-effect sensors, where the absolute multi-degree-of-freedom (DOF) positioning of a device above any magnet matrix is possible. Magnet matrices have a periodic magnetic field about each...