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Keywords: precision motion control
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Dyn. Sys., Meas., Control. December 2006, 128(4): 980–988.
Published Online: March 6, 2006
... on the platen, forcing the platen to rotate enough to cause instability. Moreover, the laser interferometers can only give relative position information by counting fringe patterns without being able to tell the absolute position. Hall-effect sensor precision positioning precision motion control...