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Keywords: microfabrication
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Journal Articles

Decoupling of a Disk Resonator From Linear Acceleration Via Mass Matrix Perturbation

David Schwartz, Robert T. M’Closkey
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. March 2012, 134(2): 021005.
https://doi.org/10.1115/1.4005275
Published Online: December 29, 2011
... gyroscopes microfabrication micromechanical resonators perturbation techniques 2012 American Society of Mechanical Engineers ...
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Topics: Approximation, Disks, Magnets, Sensors, Accelerometers, Center of mass, Optimization, Stiffness, Frequency response, Signals
Journal Articles

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation

Georg E. Fantner, Daniel J. Burns, Angela M. Belcher, Ivo W. Rangelow, Kamal Youcef-Toumi
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Dynamic Modeling Control And Manipulation At The Nanoscale
J. Dyn. Sys., Meas., Control. November 2009, 131(6): 061104.
https://doi.org/10.1115/1.4000378
Published Online: November 6, 2009
... 06 11 2009 atomic force microscopy cantilevers microactuators microfabrication microsensors Nanotechnology has a profound influence on current research and technology. Almost every field of modern technology and manufacturing utilizes techniques or knowledge gained from nanoscale...
View Article titled, DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation
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Topics: Actuators, Atomic force microscopy, Cantilevers, Deflection, Imaging