... and a microactuator. Considering dominant microactuator flexible mode dynamics and the interaction between the two actuators, an optimal sliding hyperplane is designed to maximize their cooperation so as to attain desired responses. An application example demonstrates the utility of the proposed sliding mode dual...

... 06 11 2009 atomic force microscopy cantilevers microactuators microfabrication microsensors Nanotechnology has a profound influence on current research and technology. Almost every field of modern technology and manufacturing utilizes techniques or knowledge gained from nanoscale...

... of performance, one must take into account these factors in the design of MEMS control systems. This work presents two robust control laws for a parallel-plate electrostatic microactuator in the presence of uncertainties. The dynamical model of the system, including parallel and serial parasitics, is firstly...

... and the speed virtues of coarse positioning have been the subject of intensive studies. Several microactuation techniques have been devised and are usually based on smart materials such as piezoelectric actuators, shape memory alloys, etc. The most popular micropositioning motion mechanism is the stick-slip...

...Helen M. S. Georgiou; Ridha Ben Mrad In most piezoelectric applications, including precision motion control, pressure regulation in micropumps, and force control in microactuators, there is a need to develop a model that accounts for hysteresis and describes both the electrical and mechanical...

... microactuators bending shells (structures) Solar reflectors, communication antennas, optical mirrors, etc. usually have the shape of paraboloidal shell of revolution, often due to their focusing and aiming requirement in aerospace and communication structures. This study is to investigate the precision...