New developments in MEMS (microelectromechanical systems) fabrication allowed the development of new types of atomic force microscopy (AFM) sensor with integrated readout circuit and actuator built in on the cantilever. Such a fully instrumented cantilever allows a much more direct measurement and actuation of the cantilever motion and interaction with the sample. This technology is expected to not only allow for high speed imaging but also the miniaturization of AFMs. Based on the complexity of these integrated MEMS devices, a thorough understanding of their behavior and a specialized controls approach is needed to make the most use out of this new technology. In this paper we investigate the intrinsic properties of such MEMS cantilevers and develop a combined approach for sensing and control, optimized for high speed detection and actuation. Further developments based on the results presented in this paper will help to expand the use of atomic force microscopy to a broad range of everyday applications in industrial process control and clinical diagnostics.
Skip Nav Destination
e-mail: fantner@mit.edu
e-mail: danburns@mit.edu
e-mail: belcher@mit.edu
e-mail: ivo.rangelow@tu-ilmenau.de
e-mail: youcef@mit.edu
Article navigation
November 2009
Dynamic Modeling Control And Manipulation At The Nanoscale
DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation
Georg E. Fantner,
Georg E. Fantner
Postdoctoral Fellow
Department of Materials Science,
e-mail: fantner@mit.edu
Massachusetts Institute of Technology,
Cambridge, MA 02139
Search for other works by this author on:
Daniel J. Burns,
Daniel J. Burns
Department of Mechanical Engineering,
e-mail: danburns@mit.edu
Massachusetts Institute of Technology
, Cambridge, MA 02139
Search for other works by this author on:
Angela M. Belcher,
Angela M. Belcher
Professor
Department of Materials Science and Department of Biological Engineering,
e-mail: belcher@mit.edu
Massachusetts Institute of Technology
, Cambridge, MA 02139
Search for other works by this author on:
Ivo W. Rangelow,
Ivo W. Rangelow
Professor
Department of Micro-Nanoelectronical Systems,
e-mail: ivo.rangelow@tu-ilmenau.de
Technical University Ilmenau
, Ilmenau 98693, Germany
Search for other works by this author on:
Kamal Youcef-Toumi
Kamal Youcef-Toumi
Professor
Assoc. Mem. ASME
Department of Mechanical Engineering,
e-mail: youcef@mit.edu
Massachusetts Institute of Technology
, Cambridge, MA 02139
Search for other works by this author on:
Georg E. Fantner
Postdoctoral Fellow
Department of Materials Science,
Massachusetts Institute of Technology,
Cambridge, MA 02139e-mail: fantner@mit.edu
Daniel J. Burns
Department of Mechanical Engineering,
Massachusetts Institute of Technology
, Cambridge, MA 02139e-mail: danburns@mit.edu
Angela M. Belcher
Professor
Department of Materials Science and Department of Biological Engineering,
Massachusetts Institute of Technology
, Cambridge, MA 02139e-mail: belcher@mit.edu
Ivo W. Rangelow
Professor
Department of Micro-Nanoelectronical Systems,
Technical University Ilmenau
, Ilmenau 98693, Germanye-mail: ivo.rangelow@tu-ilmenau.de
Kamal Youcef-Toumi
Professor
Assoc. Mem. ASME
Department of Mechanical Engineering,
Massachusetts Institute of Technology
, Cambridge, MA 02139e-mail: youcef@mit.edu
J. Dyn. Sys., Meas., Control. Nov 2009, 131(6): 061104 (13 pages)
Published Online: November 6, 2009
Article history
Received:
June 22, 2008
Revised:
June 27, 2009
Online:
November 6, 2009
Published:
November 6, 2009
Citation
Fantner, G. E., Burns, D. J., Belcher, A. M., Rangelow, I. W., and Youcef-Toumi, K. (November 6, 2009). "DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation." ASME. J. Dyn. Sys., Meas., Control. November 2009; 131(6): 061104. https://doi.org/10.1115/1.4000378
Download citation file:
Get Email Alerts
Multi Combustor Turbine Engine Acceleration Process Control Law Design
J. Dyn. Sys., Meas., Control
A Distributed Layered Planning and Control Algorithm for Teams of Quadrupedal Robots: An Obstacle-Aware Nonlinear Model Predictive Control Approach
J. Dyn. Sys., Meas., Control (May 2025)
Active Data-Enabled Robot Learning of Elastic Workpiece Interactions
J. Dyn. Sys., Meas., Control (May 2025)
Innovative Pressure Control With ANFIS-Enhanced Mode Switching for High-Speed Pneumatic Systems
J. Dyn. Sys., Meas., Control (May 2025)
Related Articles
Utilizing Off-Resonance and Dual-Frequency Excitation to Distinguish Attractive and Repulsive Surface Forces in Atomic Force Microscopy
J. Comput. Nonlinear Dynam (July,2011)
Thermal Writing and Nanoimaging With a Heated Atomic Force Microscope Cantilever
J. Heat Transfer (August,2002)
Influence of Local Material Properties on the Nonlinear Dynamic Behavior of an Atomic Force Microscope Probe
J. Comput. Nonlinear Dynam (October,2011)
Characterization of Intermittent Contact in Tapping-Mode Atomic Force Microscopy
J. Comput. Nonlinear Dynam (April,2006)
Related Proceedings Papers
Related Chapters
A Dynamic Path Planning Algorithm with Application to AFM Tip Steering
International Conference on Advanced Computer Theory and Engineering (ICACTE 2009)
Semi-Analytical Model of the Pull-In Behavior of an Electrostatically Actuated Cantilever Microbeam
International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3
Nanomechanical Cantilever Biosensors: Conceptual Design, Recent Developments, and Practical Implementation
Biomedical Applications of Vibration and Acoustics in Therapy, Bioeffect and Modeling