Microelectromechanical system (MEMS) and Nanoelectromechanical system (NEMS) are mostly actuated by direct forcing due to electrostatic excitation. In general, the electrostatic forcing consists of two main components, the first is the direct forcing which is based on parallel plate capacitance and another is due to the fringing effects. As the size of the beam and its cross section reduces from microscale to nanoscale, the effect of direct forcing diminishes because the overlapping area also reduces. Consequently, the fringing force effect remains the only viable factor to excite the beams electrostatically. In this paper, we present the nonlinear analysis of fixed–fixed and cantilever beams subjected to the direct force excitation, the fringing force excitation, and the combined effect of direct and fringing forces. In the present configuration, while the direct forcing is achieved by applying voltage across the beam and the bottom electrode, the fringing force can be introduced by applying voltage across the beam and the symmetrically placed side electrodes. To do the analysis, we first formulate the equation of motion considering both kinds of forces. Subsequently, we apply the method of multiple scale, MMS, to obtain the approximate solution. After validating MMS with the numerical simulation, we discuss the influence of large excitation amplitude, nonlinear damping, and the nonlinear stiffness under different forcing conditions. We found that fringing force introduces parametric excitation in the system which may be used to significantly increase the response amplitude as well as frequency bandwidth. It is also found that under the influence of the fringing forces from the side electrodes, the pull-in effect can be improved. Furthermore, the present study can be used to increase the sensitivity as well as the operating frequency range of different MEMS and NEMS based sensors under combined forcing conditions.
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September 2015
Research-Article
Nonlinear Response of a Microbeam Under Combined Direct and Fringing Field Excitation
Prashant N. Kambali,
Prashant N. Kambali
Department of Mechanical
and Aerospace Engineering,
Hyderabad 502205,
and Aerospace Engineering,
Indian Institute of Technology
,Hyderabad 502205,
India
Search for other works by this author on:
Ashok Kumar Pandey
Ashok Kumar Pandey
1
Department of Mechanical
and Aerospace Engineering,
Hyderabad 502205,
e-mail: ashok@iith.ac.in
and Aerospace Engineering,
Indian Institute of Technology
,Hyderabad 502205,
India
e-mail: ashok@iith.ac.in
1Corresponding author.
Search for other works by this author on:
Prashant N. Kambali
Department of Mechanical
and Aerospace Engineering,
Hyderabad 502205,
and Aerospace Engineering,
Indian Institute of Technology
,Hyderabad 502205,
India
Ashok Kumar Pandey
Department of Mechanical
and Aerospace Engineering,
Hyderabad 502205,
e-mail: ashok@iith.ac.in
and Aerospace Engineering,
Indian Institute of Technology
,Hyderabad 502205,
India
e-mail: ashok@iith.ac.in
1Corresponding author.
Contributed by the Design Engineering Division of ASME for publication in the JOURNAL OF COMPUTATIONAL AND NONLINEAR DYNAMICS. Manuscript received March 8, 2014; final manuscript received January 29, 2015; published online April 6, 2015. Assoc. Editor: Carmen M. Lilley.
J. Comput. Nonlinear Dynam. Sep 2015, 10(5): 051010 (10 pages)
Published Online: September 1, 2015
Article history
Received:
March 8, 2014
Revision Received:
January 29, 2015
Online:
April 6, 2015
Citation
Kambali, P. N., and Pandey, A. K. (September 1, 2015). "Nonlinear Response of a Microbeam Under Combined Direct and Fringing Field Excitation." ASME. J. Comput. Nonlinear Dynam. September 2015; 10(5): 051010. https://doi.org/10.1115/1.4029700
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