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Keywords: temperature dependence
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Proceedings Papers
Proc. ASME. MNHT2008, ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer, Parts A and B, 435-439, June 6–9, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MNHT2008-52052
..., deposited on Si substrates using plasma enhanced chemical vapor deposition (PECVD) and grown by thermal oxidation, were measured. In order to broaden the application of 3ω method, 3ω method system was combined with cryogenics system to measure temperature dependent material property. SiO 2 films, prepared...
