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Keywords: Large range
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Proceedings Papers
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 689-696, June 3–5, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MicroNano2008-70255
... 11 06 2009 A two-dimensional ultra-precision positioning system with high-speed and large-range which can be used for micro-nanometer machining has been studied out in this paper. Macro and micro moving system are used to meet the demands of ultra-precision positioning with high-speed...
