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Keywords: fluid powerClose
Proc. ASME. IMECE2005, Fluid Power Systems and Technology, 183-192, November 5–11, 2005
Paper No: IMECE2005-82002
... 28 01 2008 The design of a miniature low-cost MEMS (Micro-Electronic Mechanical Systems) based sensor for sensing pressure, flow and temperature in fluid power systems is presented. The sensor is small enough to be incorporated into hydraulic components such as pumps, motor...
Proc. ASME. IMECE2006, Fluid Power Systems and Technology, 221-230, November 5–10, 2006
Paper No: IMECE2006-13211
... 18 01 2008 This work develops a low cost multi-functional micro-electro mechanical systems (MEMS) sensor for use in fluid power systems. The device is small to facilitate easy integration into fluid power components, and has the capability to sense system pressure, fluid temperature...