This work develops a low cost multi-functional micro-electro mechanical systems (MEMS) sensor for use in fluid power systems. The device is small to facilitate easy integration into fluid power components, and has the capability to sense system pressure, fluid temperature, and small pressure differences that can be correlated to flow rate. The design of each of the sensing aspects of the device is outlined, as well as their layout on the sensor die. Pressure sensing with the device is accomplished through the use of polysilicon piezoresistors, while temperature sensing is accomplished using polysilicon thermisters. The procedure necessary to fabricate prototype units is illustrated in detail, and special processes noted. Performance characteristics of prototype sensors compare well to design model predictions. The polysilicon thermister demonstrated a linearity of 2.32%, a repeatability of 0.6%, and an accuracy of 1.5°C. The differential pressure sensor demonstrated a linearity of 0.4%, a repeatability of 0.13%, and an accuracy of 3.6%. The system pressure sensor demonstrated a linearity of 0.7%, a repeatability of 0.3% and an accuracy of 4.2%. These performance characteristics prove the functionality of the device.
Skip Nav Destination
ASME 2006 International Mechanical Engineering Congress and
Exposition
November 5–10, 2006
Chicago, Illinois, USA
Conference Sponsors:
- Fluid Power Systems and Technology Division
ISBN:
0-7918-4771-3
PROCEEDINGS PAPER
Fabrication of Integrated Pressure-Flow-Temperature Sensor for Hydraulic Systems
Charles W. Groepper,
Charles W. Groepper
University of Minnesota
Search for other works by this author on:
Kim A. Stelson
Kim A. Stelson
University of Minnesota
Search for other works by this author on:
Charles W. Groepper
University of Minnesota
Tianhong Cui
University of Minnesota
Perry Y. Li
University of Minnesota
Kim A. Stelson
University of Minnesota
Paper No:
IMECE2006-13211, pp. 221-230; 10 pages
Published Online:
December 14, 2007
Citation
Groepper, CW, Cui, T, Li, PY, & Stelson, KA. "Fabrication of Integrated Pressure-Flow-Temperature Sensor for Hydraulic Systems." Proceedings of the ASME 2006 International Mechanical Engineering Congress and Exposition. Fluid Power Systems and Technology. Chicago, Illinois, USA. November 5–10, 2006. pp. 221-230. ASME. https://doi.org/10.1115/IMECE2006-13211
Download citation file:
12
Views
Related Proceedings Papers
Related Articles
The Fluid Mechanics of Microdevices—The Freeman Scholar Lecture
J. Fluids Eng (March,1999)
Advanced Geothermal Wellbore Hydraulics Model
J. Energy Resour. Technol (September,2000)
Millimeter-Scale, Micro-Electro-Mechanical Systems Gas Turbine Engines
J. Eng. Gas Turbines Power (April,2004)
Related Chapters
Introduction
Hydraulic Fluids: A Guide to Selection, Test Methods and Use
Completing the Picture
Air Engines: The History, Science, and Reality of the Perfect Engine
Research of Key Technologies of the Stage Hydraulic System's Electro-Hydraulic Monitoring
International Conference on Information Technology and Management Engineering (ITME 2011)