Abstract

In our paper we report on piezo actuated valves with low leakage rates (<10 nl/min). The valves are made by silicon/glass and plastics. They are adapted to real, battery driven applications in medical systems and consumer products. Therefore the valves have to be optimized to extremely low energy consumption.

Volume Subject Area:
Microfluidics
Topics:
Leakage, Valves, Batteries, Biomedicine, Energy consumption, Glass, Plastics, Silicon
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