This work compares the results of a structural controls based formulation of a micro-cantilever driven by thermal excitation to measured data and weighs the impact of various factors that can affect cantilever measurement. Understanding of the dynamics of small cantilevers such as those used in atomic force microscopy (AFM) is important for many of its applications, especially those that involve observing a cantilever’s thermally driven vibrations. This work considers factors such as the fluctuation dissipation theorem, which places thermodynamic constraints on the spectrum of the thermal driving force, errors associated with photodiode calibration, and cantilever coatings. The structural controls model, which accounts for hydrodynamic loading as a feedback process, is presented and compared to experimental data. Additionally, a discussion of the model’s use for estimating (calibrating) the cantilever stiffness is given.
- Design Engineering Division and Computers and Information in Engineering Division
Evaluation of a Structural Controls Model of Thermally Driven Cantilever Vibration
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Kennedy, SJ, Cole, DG, & Clark, RL. "Evaluation of a Structural Controls Model of Thermally Driven Cantilever Vibration." Proceedings of the ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 3: 19th International Conference on Design Theory and Methodology; 1st International Conference on Micro- and Nanosystems; and 9th International Conference on Advanced Vehicle Tire Technologies, Parts A and B. Las Vegas, Nevada, USA. September 4–7, 2007. pp. 929-935. ASME. https://doi.org/10.1115/DETC2007-35445
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