This review provides a summary of the work completed to date on the nonlinear dynamics of resonant micro- and nanoelectromechanical systems (MEMS/NEMS). This research area, which has been active for approximately a decade, involves the study of nonlinear behaviors arising in small scale, vibratory, mechanical devices that are typically integrated with electronics for use in signal processing, actuation, and sensing applications. The inherent nature of these devices, which includes low damping, desired resonant operation, and the presence of nonlinear potential fields, sets an ideal stage for the appearance of nonlinear behavior, and this allows engineers to beneficially leverage nonlinear dynamics in the course of device design. This work provides an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, such as localization and synchronization, which arise in coupled resonator arrays. In addition, the work describes the active exploitation of nonlinear dynamics in the development of resonant mass sensors, inertial sensors, and electromechanical signal processing systems. The paper closes with some brief remarks about important ongoing developments in the field.

This content is only available via PDF.
You do not currently have access to this content.